Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity—Optimized Based on BP and NSGA-II Algorithms
Abstract
:1. Introduction
2. Principle and Design of SRAs with Coupled Structure
2.1. Design of DETF Resonator with Coupled Structure
2.2. Design of Decoupled Structures
2.3. Design of Single-Stage Microlever Mechanism
3. BP and NSGA-II Algorithm to Optimize Decoupled Structures
3.1. Optimization Principles and Processes
3.2. Optimization Results
4. Overall Performance Analysis of Accelerometer
4.1. Modal Analysis
4.2. Impact Resistance Analysis
4.3. The Impact of Environmental Factors
4.4. Sensitivity and Cross-Axis Sensitivity Analysis
5. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
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l/µm | w/µm | d/µm | ky/N·m−1 | kx/N·m−1 |
---|---|---|---|---|
255 | 5 | 10 | 7090.187181 | 11.07419712 |
260 | 5 | 10 | 6973.500697 | 10.47120419 |
330 | 5 | 10 | 5681.172594 | 5.291005291 |
335 | 5 | 10 | 5604.75283 | 5.050505051 |
245 | 4 | 10 | 5543.237251 | 7.092198582 |
250 | 4 | 10 | 5452.562704 | 6.711409396 |
285 | 6 | 10 | 7977.026165 | 12.80409731 |
290 | 6 | 10 | 7857.92865 | 12.18026797 |
300 | 5 | 35 | 6397.952655 | 7.299270073 |
300 | 5 | 40 | 6447.453256 | 7.352941176 |
250 | 5 | 35 | 7515.971439 | 12.40694789 |
250 | 5 | 40 | 7584.951456 | 12.56281407 |
350 | 5 | 25 | 5495.109353 | 4.566210046 |
350 | 5 | 30 | 5533.115697 | 4.587155963 |
350 | 5 | 35 | 5568.548836 | 4.62962963 |
… | … | … | … | … |
Parametric | Notation | Value |
---|---|---|
Proof of mass area | Sproof | 1.25 × 10−6 m2 |
Thicknesses | t | 35 µm |
Decoupling beam length | l | 313 µm |
Decoupling beam width | w | 5 µm |
Decoupling gap | d | 20 µm |
Lever beam length | lg | 1250 µm |
Lever beam width | wg | 80 µm |
Resonant beam length | lx | 250 µm |
Coupling beam length | lo | 160 µm |
Material | Young’s Modulus (Pa) | Poisson’s Ratio | Density (kg/m3) | CTE (1/K) | Thermal Conductivity (W/(m·K)) |
---|---|---|---|---|---|
monocrystalline silicon | 170 × 109 | 0.28 | 2329 | 2.6 × 10−6 | 130 |
Reference | Weight of the Mass (kg) | Thickness (µm) | Resonant Frequency (kHz) | Sensitivity (Hz/g) | Cross-Axis Sensitivity | Source of Results |
---|---|---|---|---|---|---|
This work | 1.019 × 10−7 | 35 | 744 | 59.1 Hz/g (Y-axis) 59 Hz/g (X-axis) | 0.508% (Y-axis) 0.339% (X-axis) | Simulation |
Yang et al. [15] | 3.76 × 10−8 | \ | 24 (Y-axis) 27 (X-axis) | 51.64 Hz/g (Y-axis) 52.57 Hz/g (X-axis) | 1.33% (Y-axis) 1.08% (X-axis) | Experiment |
Ding et al. [16] | 5.825 × 10−8 | 25 | 290 | 275 Hz/g | 3.4% | Experiment |
Niu et al. [25] | 1.24 × 10−6 | \ | 62 | 12.24 Hz/g (Y-axis) 21.30 Hz/g (X-axis) | 1.55% (Y-axis) 1.92% (X-axis) | Experiment |
Wang et al. [29] | 1.84 × 10−7 | \ | \ | 1153.3 Hz/g | 1.33% | Experiment |
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Miao, J.; Li, P.; Lv, M.; Nie, S.; Liu, Y.; Liang, R.; Ma, W.; Zhuang, X. Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity—Optimized Based on BP and NSGA-II Algorithms. Micromachines 2024, 15, 1049. https://doi.org/10.3390/mi15081049
Miao J, Li P, Lv M, Nie S, Liu Y, Liang R, Ma W, Zhuang X. Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity—Optimized Based on BP and NSGA-II Algorithms. Micromachines. 2024; 15(8):1049. https://doi.org/10.3390/mi15081049
Chicago/Turabian StyleMiao, Jiaqi, Pinghua Li, Mingchen Lv, Suzhen Nie, Yang Liu, Ruimei Liang, Weijiang Ma, and Xuye Zhuang. 2024. "Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity—Optimized Based on BP and NSGA-II Algorithms" Micromachines 15, no. 8: 1049. https://doi.org/10.3390/mi15081049