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Journal: Micromachines, 2025
Volume: 16
Number: 515

Article: Frequency-Decoupled Dual-Stage Inverse Lithography Optimization via Hierarchical Sampling and Morphological Enhancement
Authors: by Jie Zhou, Qingyan Zhang, Haifeng Sun, Chuan Jin, Ji Zhou and Junbo Liu
Link: https://www.mdpi.com/2072-666X/16/5/515

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