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Journal: Micromachines, 2025
Volume: 16
Number: 515
Article:
Frequency-Decoupled Dual-Stage Inverse Lithography Optimization via Hierarchical Sampling and Morphological Enhancement
Authors:
by
Jie Zhou, Qingyan Zhang, Haifeng Sun, Chuan Jin, Ji Zhou and Junbo Liu
Link:
https://www.mdpi.com/2072-666X/16/5/515
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