Cadenas, M.; Sun, M.; Fernández, S.; Valdueza-Felip, S.; Diez-Pascual, A.M.; Naranjo, F.B.
Development of Amorphous AlN Thin Films on ITO-Glass and ITO-PET at Low Temperatures by RF Sputtering. Micromachines 2025, 16, 993.
https://doi.org/10.3390/mi16090993
AMA Style
Cadenas M, Sun M, Fernández S, Valdueza-Felip S, Diez-Pascual AM, Naranjo FB.
Development of Amorphous AlN Thin Films on ITO-Glass and ITO-PET at Low Temperatures by RF Sputtering. Micromachines. 2025; 16(9):993.
https://doi.org/10.3390/mi16090993
Chicago/Turabian Style
Cadenas, Miriam, Michael Sun, Susana Fernández, Sirona Valdueza-Felip, Ana M. Diez-Pascual, and Fernando B. Naranjo.
2025. "Development of Amorphous AlN Thin Films on ITO-Glass and ITO-PET at Low Temperatures by RF Sputtering" Micromachines 16, no. 9: 993.
https://doi.org/10.3390/mi16090993
APA Style
Cadenas, M., Sun, M., Fernández, S., Valdueza-Felip, S., Diez-Pascual, A. M., & Naranjo, F. B.
(2025). Development of Amorphous AlN Thin Films on ITO-Glass and ITO-PET at Low Temperatures by RF Sputtering. Micromachines, 16(9), 993.
https://doi.org/10.3390/mi16090993