Micromachines, Volume 16, Issue 9

The polymer deposition layer (PDL) formed during inductively coupled plasma (ICP) processing significantly limits the figuring accuracy and surface quality of fused silica optics. This study investigates the formation mechanism, composition, and evol...

The overlying rock layers in a mining area may collapse or settle, subjecting pipelines to uneven forces that can lead to deformation or even fracture. This paper proposes a pipeline safety monitoring method that combines fiberoptic vibration and str...

Electromagnetic micro-electro-mechanical system (MEMS) micromirrors are widely used in optical scanning systems but often encounter mechanical crosstalk due to the use of shared drive coils. This phenomenon leads to parasitic motion along the slow ax...

This paper focuses on the scoring-wheel cutting process for circular structures of OLED display panels, conducting in-depth research through an experiment–analysis–optimization system. Based on the Taguchi experimental design, a three-fac...

In the research of triboelectric nanogenerators (TENGs), most attention has been paid to material modification, structural design, and power management. Little study has been performed on the transient process of TENGs, although the capacitance chara...

The measurement accuracy and equipment stability of superposition-type force sensors are primarily influenced by the layout and number of individual force sensors. Analyzing this impact effect through experimental testing for each configuration would...

This study presents a non-invasive three-dimensional cell manipulation technique based on acoustic microfluidic chips, which generates acoustic flow fields through the vibration of micropillars induced by bulk acoustic waves to achieve precise multi-...

To enhance the RF power properties of CMOS-compatible gold-free GaN devices, this work introduces a kind of GaN-on-Si HEMT with a low parasitic regrown ohmic contact technology. Attributed to the highly doped n⁺ InGaN regrown layer and smooth morphol...

This study employs reactive magnetron sputtering technology to fabricate TiN/Y-HfO₂/TiN multilayer thin film devices using titanium targets and yttrium-doped high-purity hafnium targets. A systematic investigation was conducted to explore the influen...

Zirconia (ZrO₂) ceramics are advanced structural materials that exhibit exceptional performance in aerospace and other heavy-duty applications. Since conventional machining of ZrO₂ ceramics presents significant challenges, this study employs the long...

This study aims to evaluate the effects of total ionizing dose (TID) radiation on the performance of n−MOSFET current mirrors. We propose an ovel experimental approach to analyze the interaction between charge trapping in the MOSFET gate o...

This paper presents an enhanced operation strategy for a recently proposed converter called Modified Non-Inverting Step-Down/Up (MNI-SDU) DC-DC converter intended for battery voltage regulation. Unlike the conventional approach, where both switching...

Autonomous vehicles, submersible robotic systems and drones, and other human-carrying equipment consistently adhere to a safety perimeter, ensuring collision-free navigation amidst surrounding objects. In contrast, roller coaster vehicles, despite be...

Electronic devices with polyurethane electronic packaging have been stored in Chinese tropical marine atmosphere environments for 10 years. The long-term natural aging mechanism was studied by comparing the appearance inspection, molecular structure,...

In this paper, an innovative reconfigurable microstrip RF device design method is proposed, which is inspired by origami structures. The experimental results of the reconfigurable low-pass filter indicate that the maximum origami folding height is 3...

Asymmetrical nanogrooves are commonly employed as blazed gratings for precision measurement, optical communication, and optical sensing applications. Diamond cutting is a promising deterministic processing technology for nanogrooves with a triangular...

This study introduces the Double-Diamond Reactor (DDR), a novel planar passive microreactor designed to overcome the following conventional limitations: inefficient mass transfer, high flow resistance, and clogging. The DDR integrates splitting&ndash...

Accurate classification of defects in the semiconductor manufacturing process is critical for improving yield and ensuring quality. While previous works have mainly focused on improving classification accuracy, we propose a model that can simultaneou...

This paper presents a 90–100 GHz wideband digital phase shifter with a fine resolution of 5.625°, implemented in a 0.13 μm SiGe BiCMOS process. A switch-type architecture with six cascaded units, including a novel 180° cell based on...

The power-law time plotting for reliability prediction needs to be reexamined. Until now, most degradation plots in microelectronics reliability analysis assume that the data follow a power-law change in time. The plot is the change in a measured par...

Glass-ceramic optical components are extensively employed in advanced optical systems. The high-hardness and low-fracture toughness of glass-ceramics make it prone to cracks and subsurface damage during conventional cutting. The laser-assisted diamon...

The rapid growth of low-power Internet of Things (IoT) applications has created an urgent demand for compact, battery-free power solutions. However, most existing RF energy harvesters rely on active rectifiers, multi-phase topologies, or complex tuni...

Biomedicine is moving from sculpting tissues to engineering systems [...]

Microphysiological systems (MPSs), such as organ-on-a-chip platforms, are promising alternatives to animal testing for drug development and physiological research. The BioStellar™ Plate is a commercial MPS platform featuring an open-top culture...

The cup-shaped grinding wheels with arc-shaped edges provide a satisfactory precision grinding solution for high-accuracy optical surfaces on hard and brittle materials. However, the complex profile of the arc-shaped edges of cup-shaped grinding whee...

Reaction-bonded silicon carbide (RB-SiC) is a high-performance ceramic material known for its excellent mechanical, thermal, and chemical properties. It contains phases with different mechanical properties, which introduce complex machining mechanism...

In order to achieve the high-performance machining of silicon carbide (SiC) ceramics, longitudinal–torsional ultrasonic vibration (LTUV) was introduced into precision machining, and a systematic investigation into the effects of various process param...

The art of folding paper, named “origami”, has transformed from serving religious and cultural purposes to various educational and entertainment purposes in the modern world. Significantly, the fundamental folds and creases in origami, wh...

The optical angle sensor demonstrates considerable potential to supersede the piezoresistive sensor as the preferred angle detection mechanism for micromirrors, primarily due to its reduced vulnerability to temperature fluctuations. However, this sen...

An overmoded-waveguide-based kit operating in 8–110 GHz for material complex permittivity measurement is proposed and designed in this paper. It overcomes the significant errors caused by air gaps in the conventional standard waveguide method (...

This paper presents a design method for a continuous tension detection sensor based on a cantilever beam structure and compensates for the temperature drift of a SAW sensor based on a neural network algorithm. Firstly, a novel cantilever beam roller...

The demand for high-quality beams from high-power lasers has led to the need for high-precision inspection of adhesion points for collimating lens packages. In this paper, we propose a Multi-Level Scale Attention Fusion Network (MLSAFNet) by fusing a...

Optimal sensing devices exhibit a combination of key performance attributes, including an extensive detection limit, exceptional selectivity, high sensitivity, consistent repeatability, precise measurement, and rapid response times with efficient ana...

The journal retracts the article “Design and Dynamic Simulation of a Novel Traveling Wave Linear Ultrasonic Motor” [...]

To address the issue of decreased positioning accuracy caused by interference or blockage of GNSS signals in vehicle navigation systems, this paper proposes a GNSS/MEMS IMU array fusion localization method based on an improved grey prediction model....

This paper presents a novel motion platform based on a π-shaped linear ultrasonic motor. Initially, a new preload device was designed in accordance with established criteria for high-power linear ultrasonic motors. Mounted on the base structure, t...

A sparse antenna array of subarrays can effectively reduce the digital channels of array antennas, system complexities, and hardware cost while simultaneously increasing the antenna aperture. In this study, a new optimal design is proposed for a spar...

The rapid growth of artificial intelligence (AI), data centers, and high-performance computing (HPC) has increased the demand for large bandwidth, high energy efficiency, and high-density optical interconnects. Co-packaged optics (CPO) technology off...

Aiming at the issue of time-varying measurement noise with heavy-tailed characteristics and outliers generated by the polarization compass (PC) in the micro-electro-mechanical system–inertial navigation system (MEMS-INS) and PC-integrated navig...

Aluminum nitride (AlN), a III-V wide-bandgap semiconductor, has attracted significant attention for high-temperature and high-power applications. However, achieving p-type doping in AlN remains challenging. In this study, p-type AlN thin films were f...

This study compared the effectiveness of gallium nitride (GaN) with a single carbon-doped (C-doped) buffer layer and a composite carbon/iron-doped (C/Fe-doped) buffer layer within an AlGaN/GaN high-electron-mobility transistor (HEMT). In traditional...

This paper presents a novel 1-to-N power division architecture combining overmoded ${\mathrm{TE}}_{10}$ mode waveguides and modular N-way waveguide-to-microstrip mode converters. By decomposing the ${\mathrm{TE}}_{10}$ mode field distribution along the narrow wall of a rectangular...

This study proposes a multi-stage collaborative design framework integrating sensitivity analysis, response surface methodology (RSM), and topology optimization for synergistic lightweighting and performance enhancement of micromanufacturing systems...

In this study, the nonlinearity characteristics of bilayer graphene field-effect transistors (Bi-GFETs) are analyzed by using a small-signal equivalent circuit. The static nonlinearity is determined by applying mathematical operation on the drain cur...

This study presents a reconfigurable frequency-selective surface (R-FSS) designed to dynamically switch between WLAN, WiMAX, and sub-6 GHz band frequencies. The electronic switching mechanism of this R-FSS is controlled in real-time using PIN-diodes....

Aluminum nitride (AlN) ceramic materials have relatively low thermal conductivity and poor heat dissipation performance, and are increasingly unsuitable for high-power LED packaging. In this study, diamond films were deposited on AlN ceramic substrat...

With the continuous development of wireless communication technology, the demand for wearable communication devices has rapidly increased. The antenna is one of the key components in communication devices, directly affecting the performance of wearab...

The study investigates the influence of bias voltage on the structural and morphological properties of aluminum nitride AlN (002) thin films deposited on sapphire substrates via reactive magnetron sputtering for high-frequency surface acoustic wave (...

Meta-optics, enabled by metasurfaces consisting of two-dimensional arrays of meta-atoms, offers ultrathin and multi-functional control over the vectorial wavefront of light at subwavelength scales. The unprecedented optical element technology is a pr...

In the era of artificial intelligence, neuromorphic devices that simulate brain functions have received increasingly widespread attention. In this paper, an artificial neural synapse device based on ZnAlSnO thin-film transistors was fabricated, and i...