Yang, J.; Si, C.; Han, G.; Zhang, M.; Ma, L.; Zhao, Y.; Ning, J.
Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators. Micromachines 2015, 6, 281-290.
https://doi.org/10.3390/mi6020281
AMA Style
Yang J, Si C, Han G, Zhang M, Ma L, Zhao Y, Ning J.
Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators. Micromachines. 2015; 6(2):281-290.
https://doi.org/10.3390/mi6020281
Chicago/Turabian Style
Yang, Jian, Chaowei Si, Guowei Han, Meng Zhang, Liuhong Ma, Yongmei Zhao, and Jin Ning.
2015. "Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators" Micromachines 6, no. 2: 281-290.
https://doi.org/10.3390/mi6020281
APA Style
Yang, J., Si, C., Han, G., Zhang, M., Ma, L., Zhao, Y., & Ning, J.
(2015). Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators. Micromachines, 6(2), 281-290.
https://doi.org/10.3390/mi6020281