Special Issue: 15 Years of SU8 as MEMS Material
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- The formulation of new materials based on SU-8 is the main topic of two papers, both studying the improvement of the tribological properties of this material, by creating a new composite material based on a SU-8 polymer matrix in which either perfluoropolyether lubricant droplets [6] or droplets of an ionic liquid [7] are dispersed.
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- Innovative processing methods of SU-8 are described in four papers. One investigates the photolithography of SU-8 without cleanroom facility, using printed shapes on transparencies as mask and a printed circuit board (PCB) exposure equipment instead of a mask aligner [8]. Well-defined structures can be obtained this way with a resolution of about 10 μm, sufficient for most simple microfluidic applications. Another paper investigates the fabrication of 100 to 500 nm in diameter SU-8 beads by electrospray, to reproduce the Mie light scattering performed by butterfly wings and use this effect in a glucose sensor [9]. Jacot-Descombes et al. use inkjet printing to shape a SU-8-based composite resist into spherical caps [10]. The composite resist contains Fe3O4 nanoparticles that are aligned to an external magnetic field during the SU-8 curing and the obtained components are magnetically actuated microstructures that can be self-assembled. The last paper that describes an innovative processing method is based on the carbonization of SU-8 in an inert atmosphere [11]. This allows to fabricate glassy-carbon micro components having all the possible shapes that can be achieved with SU-8 processing techniques. Glassy carbon is extremely inert chemically, impermeable to gasses. It has a large electrochemical stability window and physical properties that make it a material of interest for a large set of applications.
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- Applications based on the use of SU-8 are presented in all the papers of this special issue, ranging from structural components to micro-channels, optical components, biomedical devices, etc. Three papers focus directly on applications of SU-8. Al-Halhouli et al. use SU-8 to fabricate a synchronous micromotor, and investigate its use in various microfluidic applications [12]. Huby et al. fabricated nanowires and nanotubes that can be used as optical waveguides [13]. Finally, Mekaru investigated the use of SU-8 in the fabrication of X-ray masks when combined with tapered silicon structures, and shows that the obtained masks can be used in grayscale X-ray lithography [14].
References
- Lee, K.; LaBianca, N.; Rishton, S.; Zolgharnain, S.; Gelorme, J.; Shaw, J.; Chang, T.P. Micromachining applications of a high resolution ultrathick photoresist. J. Vacuum Sci. Technol. B 1995, 13, 3012–3016. [Google Scholar] [CrossRef]
- Lorenz, H.; Despont, M.; Fahrni, N.; Brugger, J.; Vettiger, P.; Renaud, P. High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS. Sens. Actuators A Phys. 1998, 64, 33–39. [Google Scholar] [CrossRef]
- Genolet, G.; Lorenz, H. UV-LIGA: From development to commercialization. Micromachines 2014, 5, 486–495. [Google Scholar] [CrossRef]
- Lee, J.; Choi, K.-H.; Yoo, K. Innovative SU-8 lithography techniques and their applications. Micromachines 2015, 6, 1–18. [Google Scholar] [CrossRef]
- Maoddi, P.; Mapelli, A.; Jiguet, S.; Renaud, P. SU-8 as a material for microfabricated particle physics detectors. Micromachines 2014, 5, 594–606. [Google Scholar] [CrossRef]
- Saravanan, P.; Satyanarayana, N.; Sinha, S. SU-8 composite based “lube-tape” for a wide range of tribological applications. Micromachines 2014, 5, 263–274. [Google Scholar] [CrossRef]
- Batooli, L.; Maldonado, S.; Judelewicz, M.; Mischler, S. Novel SU-8/ionic liquid composite for tribological coatings and mems. Micromachines 2015, 6, 611–621. [Google Scholar] [CrossRef]
- Pinto, V.; Sousa, P.; Cardoso, V.; Minas, G. Optimized SU-8 processing for low-cost microstructures fabrication without cleanroom facilities. Micromachines 2014, 5, 738–755. [Google Scholar] [CrossRef] [Green Version]
- Bonzon, D.; Martinez-Duarte, R.; Renaud, P.; Madou, M. Biomimetic Pieris rapae’s nanostructure and its use as a simple sucrose sensor. Micromachines 2014, 5, 216–227. [Google Scholar] [CrossRef]
- Jacot-Descombes, L.; Gullo, M.; Cadarso, V.; Mastrangeli, M.; Ergeneman, O.; Peters, C.; Fatio, P.; Freidy, M.; Hierold, C.; Nelson, B.; et al. Inkjet printing of high aspect ratio superparamagnetic SU-8 microstructures with preferential magnetic directions. Micromachines 2014, 5, 583–593. [Google Scholar] [CrossRef]
- Martinez-Duarte, R. SU-8 photolithography as a toolbox for carbon mems. Micromachines 2014, 5, 766–782. [Google Scholar] [CrossRef]
- Al-Halhouli, A.; Demming, S.; Waldschik, A.; Büttgenbach, S. Implementation of synchronous micromotor in developing integrated microfluidic systems. Micromachines 2014, 5, 442–456. [Google Scholar] [CrossRef]
- Huby, N.; Bigeon, J.; Danion, G.; Duvail, J.-L.; Gouttefangeas, F.; Joanny, L.; Bêche, B. Transferable integrated optical SU8 devices: From micronic waveguides to 1D-nanostructures. Micromachines 2015, 6, 544–553. [Google Scholar] [CrossRef] [Green Version]
- Mekaru, H. Performance of SU-8 membrane suitable for deep X-ray grayscale lithography. Micromachines 2015, 6, 252–265. [Google Scholar] [CrossRef]
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Bertsch, A.; Renaud, P. Special Issue: 15 Years of SU8 as MEMS Material. Micromachines 2015, 6, 790-792. https://doi.org/10.3390/mi6060790
Bertsch A, Renaud P. Special Issue: 15 Years of SU8 as MEMS Material. Micromachines. 2015; 6(6):790-792. https://doi.org/10.3390/mi6060790
Chicago/Turabian StyleBertsch, Arnaud, and Philippe Renaud. 2015. "Special Issue: 15 Years of SU8 as MEMS Material" Micromachines 6, no. 6: 790-792. https://doi.org/10.3390/mi6060790