Multi-Layer Anti-Reflection Film Based on SiOx and NbOx by DC Pulse Sputter System with Inductively Coupled Plasma Source
Abstract
:1. Introduction
2. Materials and Methods
2.1. Materials
2.2. Characteristics
2.3. Fabrication of High-Quality Multi-Layers AR Film Based on SiOx and NbOx (M-SiNb)
3. Results
3.1. Characteristics of SiOx and NbOx Single Layer
3.2. Characteristics of the Multi-Layer AR Film Based on SiOx and NbOx (M-SiNb)
4. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Lee, H.; Park, M.; Jeon, M.; Kim, B. Multi-Layer Anti-Reflection Film Based on SiOx and NbOx by DC Pulse Sputter System with Inductively Coupled Plasma Source. Crystals 2020, 10, 424. https://doi.org/10.3390/cryst10060424
Lee H, Park M, Jeon M, Kim B. Multi-Layer Anti-Reflection Film Based on SiOx and NbOx by DC Pulse Sputter System with Inductively Coupled Plasma Source. Crystals. 2020; 10(6):424. https://doi.org/10.3390/cryst10060424
Chicago/Turabian StyleLee, Hanbin, Minjeong Park, Minhyon Jeon, and Byeongcheol Kim. 2020. "Multi-Layer Anti-Reflection Film Based on SiOx and NbOx by DC Pulse Sputter System with Inductively Coupled Plasma Source" Crystals 10, no. 6: 424. https://doi.org/10.3390/cryst10060424
APA StyleLee, H., Park, M., Jeon, M., & Kim, B. (2020). Multi-Layer Anti-Reflection Film Based on SiOx and NbOx by DC Pulse Sputter System with Inductively Coupled Plasma Source. Crystals, 10(6), 424. https://doi.org/10.3390/cryst10060424