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Journal: Crystals, 2021
Volume: 11
Number: 405

Article: Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition
Authors: by Il-Hwan Hwang, Myoung-Jin Kang, Ho-Young Cha and Kwang-Seok Seo
Link: https://www.mdpi.com/2073-4352/11/4/405

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