Shen, Y.; Ma, H.-P.; Wang, Z.-Y.; Gu, L.; Zhang, J.; Li, A.; Yang, M.-Y.; Zhang, Q.-C.
Influence of Rapid Thermal Annealing on the Characteristics of Sn-Doped Ga2O3 Films Fabricated Using Plasma-Enhanced Atomic Layer Deposition. Crystals 2023, 13, 301.
https://doi.org/10.3390/cryst13020301
AMA Style
Shen Y, Ma H-P, Wang Z-Y, Gu L, Zhang J, Li A, Yang M-Y, Zhang Q-C.
Influence of Rapid Thermal Annealing on the Characteristics of Sn-Doped Ga2O3 Films Fabricated Using Plasma-Enhanced Atomic Layer Deposition. Crystals. 2023; 13(2):301.
https://doi.org/10.3390/cryst13020301
Chicago/Turabian Style
Shen, Yi, Hong-Ping Ma, Zhen-Yu Wang, Lin Gu, Jie Zhang, Ao Li, Ming-Yang Yang, and Qing-Chun Zhang.
2023. "Influence of Rapid Thermal Annealing on the Characteristics of Sn-Doped Ga2O3 Films Fabricated Using Plasma-Enhanced Atomic Layer Deposition" Crystals 13, no. 2: 301.
https://doi.org/10.3390/cryst13020301
APA Style
Shen, Y., Ma, H. -P., Wang, Z. -Y., Gu, L., Zhang, J., Li, A., Yang, M. -Y., & Zhang, Q. -C.
(2023). Influence of Rapid Thermal Annealing on the Characteristics of Sn-Doped Ga2O3 Films Fabricated Using Plasma-Enhanced Atomic Layer Deposition. Crystals, 13(2), 301.
https://doi.org/10.3390/cryst13020301