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Journal: Crystals, 2023
Volume: 13
Number: 301

Article: Influence of Rapid Thermal Annealing on the Characteristics of Sn-Doped Ga2O3 Films Fabricated Using Plasma-Enhanced Atomic Layer Deposition
Authors: by Yi Shen, Hong-Ping Ma, Zhen-Yu Wang, Lin Gu, Jie Zhang, Ao Li, Ming-Yang Yang and Qing-Chun Zhang
Link: https://www.mdpi.com/2073-4352/13/2/301

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