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Journal: Polymers, 2025
Volume: 17
Number: 613

Article: Effect of Structurally Modified Toluene Diisocyanate-Based Polyurethane Pads on Chemical Mechanical Polishing of 4H Silicon Carbide Substrate
Authors: by Yiming Meng, Shanduan Zhang and Zefang Zhang
Link: https://www.mdpi.com/2073-4360/17/5/613

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