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Journal: Polymers, 2025
Volume: 17
Number: 613
Article:
Effect of Structurally Modified Toluene Diisocyanate-Based Polyurethane Pads on Chemical Mechanical Polishing of 4H Silicon Carbide Substrate
Authors:
by
Yiming Meng, Shanduan Zhang and Zefang Zhang
Link:
https://www.mdpi.com/2073-4360/17/5/613
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