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Journal: Actuators, 2023
Volume: 12
Number: 337
Article:
A Method for Improving Heat Dissipation and Avoiding Charging Effects for Cavity Silicon-on-Glass Structures
Authors:
by
Junduo Wang, Yuwei Hu, Lei Qian, Yameng Shan and Wenjiang Shen
Link:
https://www.mdpi.com/2076-0825/12/8/337
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