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Journal: Actuators, 2024
Volume: 13
Number: 115
Article:
On the Evolution of Stress and Microstructure in Radio Frequency-Sputtered Lead-Free (Ba,Ca)(Zr,Ti)O3 Thin Films
Authors:
by
Runar Plünnecke Dahl-Hansen, Marit Synnøve Sæverud Stange, Tor Olav Sunde, Johan Henrik Ræder and Per Martin Rørvik
Link:
https://www.mdpi.com/2076-0825/13/3/115
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