Effect of RF Power on the Physical Properties of Sputtered ZnSe Nanostructured Thin Films for Photovoltaic Applications
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussion
3.1. Structural Characterizations
3.2. Morphological Characterizations
3.3. Optical Characterizations
3.4. Electrical Characterizations
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
Abbreviations
R&D | Research & Development |
MDEO | R&D Center for Materials and Electronic & Optoelectronic Devices |
IMCN | Institute of Condensed Matter and Nanosciences |
UCLouvain | Université catholique de Louvain |
RF | Radio frequency |
(GI)XRD | (Grazing incidence) X-ray diffraction |
AFM | Atomic force microscope |
SEM | Scanning Electron Microscope |
OS/SE | Optical spectroscopy/Spectroscopic ellipsometry |
PME | Phase modulated spectro-ellipsometer |
2D | Two-dimensional |
RMS | Root mean square roughness |
Ssk/Sku | Skewness/Kurtosis |
MSE | Mean-squared error |
VIS | Visible spectral region |
NIR | Near-infrared spectral region |
SCLC | Space charge limited currents |
UEFISCDI | Executive Unit for Financing Higher Education, Research, Development and Innovation |
References
- Hu, R.; Xi, W.; Liu, Y.; Tang, K.; Song, J.; Luo, X.; Wu, J.; Qiu, C.W. Thermal camouflaging metamaterials. Mater. Today 2021, 45, 120–141. [Google Scholar] [CrossRef]
- Xi, W.; Liu, Y.; Song, J.; Hu, R.; Luo, X. High-throughput screening of a high-Q mid-infrared Tamm emitter by material informatics. Opt. Lett. 2021, 46, 888–891. [Google Scholar] [CrossRef]
- Hu, R.; Wang, Y.; Zou, Y.; Chen, X.; Liu, S.; Luo, X. Study on phosphor sedimentation effect in white light-emitting diode packages by modeling multi-layer phosphors with the modified Kubelka-Munk theory. J. Appl. Phys. 2013, 113, 063108. [Google Scholar] [CrossRef] [Green Version]
- Xie, B.; Wang, Y.; Liu, H.; Ma, J.; Zhou, S.; Yu, X.; Lan, W.; Wang, K.; Hu, R.; Luo, X. Targeting cooling for quantum dots by 57.3 °C with air-bubbles-assembled three-dimensional hexagonal boron nitride heat dissipation networks. Chem. Eng. J. 2022, 427, 130958. [Google Scholar] [CrossRef]
- Hu, R.; Song, J.; Liu, Y.; Xi, W.; Zhao, Y.; Yu, X.; Cheng, Q.; Tao, G.; Luo, X. Machine learning-optimized Tamm emitter for high-performance thermophotovoltaic system with detailed balance analysis. Nano Energy 2020, 72, 104687. [Google Scholar] [CrossRef]
- Saha, S.; Johnson, M.; Altayaran, F.; Wang, Y.; Wang, D.; Zhang, Q. Electrodeposition Fabrication of Chalcogenide Thin Films for Photovoltaic Applications. Electrochem 2020, 1, 286–321. [Google Scholar] [CrossRef]
- Ou, K.; Wang, S.; Wan, G.; Huang, M.; Zhang, Y.; Bai, L.; Yi, L. A study of structural, morphological and optical properties of nanostructured ZnSe/ZnS multilayer thin films. J. Alloys Compd. 2017, 726, 707–711. [Google Scholar] [CrossRef]
- Godlewski, M.; Guziewicz, E.; Kopalko, K.; Łusakowska, E.; Dynowska, E.; Godlewski, M.M.; Goldys, E.M.; Phillips, M.R. Origin of white color light emission in ALE-grown ZnSe. J. Lumin. 2003, 102–103, 455–459. [Google Scholar] [CrossRef]
- Mittal, V.; Sessions, N.P.; Wilkinson, J.S.; Murugan, G.S. Optical quality ZnSe films and low loss waveguides on Si substrates for mid-infrared applications. Opt. Mater. Express 2017, 7, 712–725. [Google Scholar] [CrossRef]
- Vivet, N.; Morales, M.; Levalois, M.; Charvet, S.; Jomard, F. Optimization of the structural, microstructural and optical properties of nanostructured Cr2+:ZnSe films deposited by magnetron co-sputtering for mid-infrared applications. Thin Solid Films 2010, 519, 106–110. [Google Scholar] [CrossRef]
- Venkatachalam, S.; Agilan, S.; Mangalaraj, D.; Narayandass, S.K. Optoelectronic properties of ZnSe thin films. Mater. Sci. Semicond. Process. 2007, 10, 128–132. [Google Scholar] [CrossRef]
- Lin, T.K.; Chang, S.J.; Su, Y.K.; Chiou, Y.Z.; Wang, C.K.; Chang, S.P.; Chang, C.M.; Tang, J.J.; Huang, B.R. ZnSe MSM photodetectors prepared on GaAs and ZnSe substrates. Mater. Sci. Eng. B 2005, 119, 202–205. [Google Scholar] [CrossRef]
- Feng, G.; Yang, C.; Zhou, S. Nanocrystalline Cr2+-doped ZnSe Nanowires Laser. Nano Lett. 2013, 13, 272–275. [Google Scholar] [CrossRef] [PubMed]
- Holzman, J.F.; Vermeulen, F.E.; Irvine, S.E.; Elezzabi, A.Y. Free-space detection of terahertz radiation using crystalline and polycrystalline ZnSe electro-optic sensors. Appl. Phys. Lett. 2002, 81, 2294–2296. [Google Scholar] [CrossRef]
- Elsaeedy, H.I.; Hassan, A.A.; Yakout, H.A.; Qasem, A. The significant role of ZnSe layer thickness in optimizing the performance of ZnSe/CdTe solar cell for optoelectronic applications. Opt. Laser Technol. 2021, 141, 107139. [Google Scholar] [CrossRef]
- Antohe, S.; Ion, L.; Girtan, M.; Toma, O. Optical and morphological studies of thermally vacuum evaporated ZnSe thin films. Rom. Rep. Phys. 2013, 65, 805–811. [Google Scholar]
- Khurram, A.A.; Jabar, F.; Mumtaz, M.; Khan, N.A.; Mehmood, M.N. Effect of light, medium and heavy ion irradiations on the structural and electrical properties of ZnSe thin films. Nucl. Instrum. Methods Phys. Res. Sect. B Beam Interact. Mater. At. 2013, 313, 40–44. [Google Scholar] [CrossRef]
- Bacaksiz, E.; Aksu, S.; Polat, I.; Yılmaz, S.; Altunbaş, M. The influence of substrate temperature on the morphology, optical and electrical properties of thermal-evaporated ZnSe thin films. J. Alloys Compd. 2009, 487, 280–285. [Google Scholar] [CrossRef]
- Lokhande, C.D.; Patil, P.S.; Tributsch, H.; Ennaoui, A. ZnSe thin films by chemical bath deposition method. Sol. Energy Mater. Sol. Cells 1998, 55, 379–393. [Google Scholar] [CrossRef]
- Kale, R.B.; Lokhande, C.D.; Mane, R.S.; Han, S.H. Use of modified chemical route for ZnSe nanocrystalline thin films growth: Study on surface morphology and physical properties. Appl. Surf. Sci. 2006, 252, 5768–5775. [Google Scholar] [CrossRef]
- Wei, A.; Zhao, X.; Liu, J.; Zhao, Y. Investigation on the structure and optical properties of chemically deposited ZnSe nanocrystalline thin films. Phys. B Condens. Matter 2013, 410, 120–125. [Google Scholar] [CrossRef]
- Rumberg, A.; Sommerhalter, C.; Toplak, M.; Jäger-Waldau, A.; Lux-Steiner, M.C. ZnSe thin films grown by chemical vapour deposition for application as buffer layer in CIGSS solar cells. Thin Solid Films 2000, 361–362, 172–176. [Google Scholar] [CrossRef]
- Kumar, V.; Khan, K.L.A.; Singh, G.; Sharma, T.P.; Hussain, M. ZnSe sintered films: Growth and characterization. Appl. Surf. Sci. 2007, 253, 3543–3546. [Google Scholar] [CrossRef]
- Arslan, M.; Maqsood, A.; Mahmood, A.; Iqbal, A. Structural and optical properties of copper enriched ZnSe thin films prepared by closed space sublimation technique. Mater. Sci. Semicond. Process. 2013, 16, 1797–1803. [Google Scholar] [CrossRef]
- Riveros, G.; Gómez, H.; Henríquez, R.; Schrebler, R.; Marotti, R.E.; Dalchiele, E.A. Electrodeposition and characterization of ZnSe semiconductor thin films. Sol. Energy Mater. Sol. Cells 2001, 70, 255–268, CANCUN 2000. [Google Scholar] [CrossRef]
- Kim, T.W.; Jung, M.; Lee, D.U.; Oh, E.; Lee, S.D.; Jung, H.D.; Kim, M.D.; Kim, J.R.; Park, H.S.; Lee, J.Y. Structural and optical properties of undoped and doped ZnSe/GaAs strained heterostructures. Thin Solid Films 1997, 298, 187–190. [Google Scholar] [CrossRef]
- Williams, J.E.; Camata, R.P.; Fedorov, V.V.; Mirov, S.B. Pulsed laser deposition of chromium-doped zinc selenide thin films for mid-infrared applications. Appl. Phys. A 2008, 91, 333–335. [Google Scholar] [CrossRef]
- Rizzo, A.; Tagliente, M.A.; Caneve, L.; Scaglione, S. The influence of the momentum transfer on the structural and optical properties of ZnSe thin films prepared by r.f. magnetron sputtering. Thin Solid Films 2000, 368, 8–14. [Google Scholar] [CrossRef]
- Ion, L.; Iftimie, S.; Radu, A.; Antohe, V.A.; Toma, O.; Antohe, S. Physical properties of RF-sputtered ZnSe thin films for photovoltaic applications: Influence of film thickness. Porc. Rom. Acad. Ser. A 2021, 22, 25–34. [Google Scholar]
- Gashin, P.; Focsha, A.; Potlog, T.; Simashkevich, A.V.; Leondar, V.V. n-ZnSe/p-ZnTe/n-CdSe tandem solar cells. Sol. Energy Mater. Sol. Cells 1997, 46, 323–331. [Google Scholar] [CrossRef]
- Eisele, W.; Ennaoui, A.; Schubert-Bischoff, P.; Giersig, M.; Pettenkofer, C.; Krauser, J.; Lux-Steiner, M.; Zweigart, S.; Karg, F. XPS, TEM and NRA investigations of Zn(Se,OH)/Zn(OH)2 films on Cu(In,Ga)(S,Se)2 substrates for highly efficient solar cells. Sol. Energy Mater. Sol. Cells 2003, 75, 17–26. [Google Scholar] [CrossRef]
- Toma, O.; Ion, L.; Iftimie, S.; Antohe, V.A.; Radu, A.; Raduta, A.M.; Manica, D.; Antohe, S. Physical properties of rf-sputtered ZnS and ZnSe thin films used for double-heterojunction ZnS/ZnSe/CdTe photovoltaic structures. Appl. Surf. Sci. 2019, 478, 831–839. [Google Scholar] [CrossRef]
- Saikia, P.; Saikia, D.P.K.; Saikia, D. Fabrication and characterization of ZnSe/ZnTe/CdTe/HgTe multijunction solar cell. Optoelectron. Adv. Mater. Rapid Commun. 2011, 5, 204–207. [Google Scholar]
- Prabhu, M.; Kamalakkannan, K.; Soundararajan, N.; Ramachandran, K. Fabrication and characterization of ZnSe thin films based low-cost dye sensitized solar cells. J. Mater. Sci. Mater. Electron. 2015, 26, 3963–3969. [Google Scholar] [CrossRef]
- Toma, O.; Ion, L.; Iftimie, S.; Radu, A.; Antohe, S. Structural, morphological and optical properties of rf-sputtered CdS thin films. Mater. Des. 2016, 100, 198–203. [Google Scholar] [CrossRef]
- Chan, K.Y.; Teo, B.S. Investigation into the influence of direct current DC power in the magnetron sputtering process on the copper crystallite size. Microelectron. J. 2007, 38, 60–62. [Google Scholar] [CrossRef]
- Ghorannevis, Z.; Akbarnejad, E.; Ghoranneviss, M. Effects of various deposition times and RF powers on CdTe thin film growth using magnetron sputtering. J. Theor. Appl. Phys. 2016, 10, 225–231. [Google Scholar] [CrossRef] [Green Version]
- Langford, J.I.; Delhez, R.; de Keijser, T.H.; Mittemeijer, E.J. Profile Analysis for Microcrystalline Properties by the Fourier and Other Methods. Aust. J. Phys. 1988, 41, 173–188. [Google Scholar] [CrossRef] [Green Version]
- Venkatachalam, S.; Mangalaraj, D.; Narayandass, S.K. Influence of substrate temperature on the structural, optical and electrical properties of zinc selenide ZnSe thin films. J. Phys. D Appl. Phys. 2006, 39, 4777–4782. [Google Scholar] [CrossRef]
- Duta, M.; Anastasescu, M.; Calderon-Moreno, J.M.; Predoana, L.; Preda, S.; Nicolescu, M.; Stroescu, H.; Bratan, V.; Dascalu, I.; Aperathitis, E.; et al. Sol-gel versus sputtering indium tin oxide films as transparent conducting oxide materials. J. Mater. Sci. Mater. Electron. 1988, 27, 4913–4922. [Google Scholar] [CrossRef]
- Zhou, C.; Li, T.; Wei, X.; Yan, B. Effect of the Sputtering Power on the Structure, Morphology and Magnetic Properties of Fe Films. Metals 2020, 10, 896. [Google Scholar] [CrossRef]
- Toma, O.; Ion, L.; Girtan, M.; Antohe, S. Optical, morphological and electrical studies of thermally vacuum evaporated CdTe thin films for photovoltaic applications. Sol. Energy 2014, 108, 51–60. [Google Scholar] [CrossRef] [Green Version]
- Eaton, P.; West, P. Atomic Force Microscopy; Oxford University Press: Oxford, UK, 2010; 256p. [Google Scholar]
- Andújar, J.L.; Bertran, E.; Canillas, A.; Roch, C.; Morenza, J.L. Influence of pressure and radio frequency power on deposition rate and structural properties of hydrogenated amorphous silicon thin films prepared by plasma deposition. J. Vac. Sci. Technol. A 1991, 9, 2216–2221. [Google Scholar] [CrossRef] [Green Version]
- Wu, S.; Chen, H.; Du, X.; Liu, Z. Effect of deposition power and pressure on rate deposition and resistivity of titanium thin films grown by DC magnetron sputtering. Spectrosc. Lett. 2016, 49, 514–519. [Google Scholar] [CrossRef]
- Yadav, B.K.; Singh, P.; Pandey, D.K. Synthesis and Non-Destructive Characterization of Zinc Selenide Thin Films. Z. Nat. A 2019, 74, 993–999. [Google Scholar] [CrossRef]
- Yoshikawa, H.; Adachi, S. Optical Constants of ZnO. Jpn. J. Appl. Phys. 1997, 36, 6237–6243. [Google Scholar] [CrossRef]
- Erman, M.; Theeten, J.B.; Frijlink, P.; Gaillard, S.; Hia, F.J.; Alibert, C. Electronic states and thicknesses of GaAs/GaAlAs quantum wells as measured by electroreflectance and spectroscopic ellipsometry. J. Appl. Phys. 1984, 56, 3241–3249. [Google Scholar] [CrossRef]
- Ashraf, M.; Akhtar, S.M.J.; Khan, A.F.; Ali, Z.; Qayyum, A. Effect of annealing on structural and optoelectronic properties of nanostructured ZnSe thin films. J. Alloys Compd. 2011, 509, 2414–2419. [Google Scholar] [CrossRef]
- Subbaiah, Y.P.V.; Prathap, P.; Devika, M.; Reddy, K.T.R. Close-spaced evaporated ZnSe films: Preparation and characterization. Phys. B Condens. Matter 2005, 365, 240–246. [Google Scholar] [CrossRef]
- Biswas, S.K.; Chaudhuri, S.; Choudhury, A. Effects of heat treatment on the optical and structural properties of InSe thin films. Phys. Status Solidi (a) 1988, 105, 467–475. [Google Scholar] [CrossRef]
- Antohe, S. Electrical and Photovoltaic Properties of Tetrapyrydilporphyrin Sandwich Cells. Phys. Status Solidi (a) 1993, 136, 401–410. [Google Scholar] [CrossRef]
- Ruxandra, V.; Antohe, S. The effect of the electron irradiation on the electrical properties of thin polycrystalline CdS layers. J. Appl. Phys. 1998, 84, 727–733. [Google Scholar] [CrossRef]
- Iftimie, S.; Majkic, A.; Besleaga, C.; Antohe, V.A.; Radu, A.; Radu, M.; Arghir, I.; Florica, C.; Ion, L.; Bratina, G.; et al. Study of electrical and optical properties of ITO/PEDOT/P3HT:PCBM(1:1)/LiF/Al photovoltaic structures. J. Optoelectron. Adv. Mater. 2020, 12, 2171–2175. [Google Scholar]
- Antohe, S.; Iftimie, S.; Hrostea, L.; Antohe, V.A.; Girtan, M. A critical review of photovoltaic cells based on organic monomeric and polymeric thin film heterojunctions. Thin Solid Films 2017, 642, 219–231. [Google Scholar] [CrossRef]
- Lampert, M.A.; Mark, P. Current Injection in Solids; Electrical Science, Academic Press: New York, NY, USA, 1970; 351p, ISBN 978-0-12-435350-3. [Google Scholar]
- Rao, G.; Bangera, K.; Shivakumar, G.K. Studies on vacuum deposited p-ZnTe/n-ZnSe heterojunction diodes. Solid-State Electron. 2010, 54, 787–790. [Google Scholar] [CrossRef]
- Seyam, M.A.M.; El-Shair, H.T.; Salem, G.F. Electrical properties and transport mechanisms of p-ZnTe/n-Si heterojunctions. Eur. Phys. J. Appl. Phys. 2008, 41, 221–227. [Google Scholar] [CrossRef]
Sample | RF Power (W) | (nm) | a (Å) | |
---|---|---|---|---|
ZnSe2 | 80 | 51.8 | 5.603 | |
ZnSe3 | 100 | 79.7 | 5.619 | |
ZnSe4 | 120 | 107.4 | 5.628 |
Sample | RF Power (W) | Thickness (nm) | (nm) | RMS (nm) | Ssk | Sku |
---|---|---|---|---|---|---|
ZnSe1 | 60 | 37 | 1.9 | 2.4 | 0.8 | 1.4 |
ZnSe2 | 80 | 170 | 1.5 | 1.8 | 0.3 | 0.2 |
ZnSe3 | 100 | 271 | 0.8 | 1.0 | 0.3 | 0.1 |
ZnSe4 | 120 | 351 | 1.3 | 1.6 | 0.3 | 0.5 |
Sample | RF Power (W) | Thickness (nm) | (eV) |
---|---|---|---|
ZnSe1 | 60 | 37 | 2.54 |
ZnSe2 | 80 | 170 | 2.59 |
ZnSe3 | 100 | 271 | 2.60 |
ZnSe4 | 120 | 351 | 2.65 |
Sample | RF Power (W) | Thickness (nm) | n (at nm) | k (at nm) | (eV) | MSE |
---|---|---|---|---|---|---|
ZnSe1 | 60 | 37 | 2.723 | 0.237 | 2.56 | 6.02 |
ZnSe2 | 80 | 170 | 2.946 | 0.184 | 2.59 | 5.85 |
ZnSe3 | 100 | 271 | 3.083 | 0.157 | 2.61 | 6.81 |
ZnSe4 | 120 | 351 | 3.386 | 0.139 | 2.64 | 4.66 |
Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations. |
© 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
Share and Cite
Toma, O.; Antohe, V.-A.; Panaitescu, A.-M.; Iftimie, S.; Răduţă, A.-M.; Radu, A.; Ion, L.; Antohe, Ş. Effect of RF Power on the Physical Properties of Sputtered ZnSe Nanostructured Thin Films for Photovoltaic Applications. Nanomaterials 2021, 11, 2841. https://doi.org/10.3390/nano11112841
Toma O, Antohe V-A, Panaitescu A-M, Iftimie S, Răduţă A-M, Radu A, Ion L, Antohe Ş. Effect of RF Power on the Physical Properties of Sputtered ZnSe Nanostructured Thin Films for Photovoltaic Applications. Nanomaterials. 2021; 11(11):2841. https://doi.org/10.3390/nano11112841
Chicago/Turabian StyleToma, Ovidiu, Vlad-Andrei Antohe, Ana-Maria Panaitescu, Sorina Iftimie, Ana-Maria Răduţă, Adrian Radu, Lucian Ion, and Ştefan Antohe. 2021. "Effect of RF Power on the Physical Properties of Sputtered ZnSe Nanostructured Thin Films for Photovoltaic Applications" Nanomaterials 11, no. 11: 2841. https://doi.org/10.3390/nano11112841