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Journal: Nanomaterials, 2021
Volume: 11
Number: 1209
Article:
The Effect of Doping on the Digital Etching of Silicon-Selective Silicon–Germanium Using Nitric Acids
Authors:
by
Yangyang Li, Huilong Zhu, Zhenzhen Kong, Yongkui Zhang, Xuezheng Ai, Guilei Wang, Qi Wang, Ziyi Liu, Shunshun Lu, Lu Xie, Weixing Huang, Yongbo Liu, Chen Li, Junjie Li, Hongxiao Lin, Jiale Su, Chuanbin Zeng and Henry H. Radamson
Link:
https://www.mdpi.com/2079-4991/11/5/1209
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