Growth and Crystallization of SiO2/GeO2 Thin Films on Si(100) Substrates
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussion
3.1. SiO/GeO Film Growth
3.2. Film Crystallization
4. Conclusions
Supplementary Materials
Author Contributions
Funding
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Antoja-Lleonart, J.; Ocelík, V.; Zhou, S.; de Hond, K.; Koster, G.; Rijnders, G.; Noheda, B. Growth and Crystallization of SiO2/GeO2 Thin Films on Si(100) Substrates. Nanomaterials 2021, 11, 1654. https://doi.org/10.3390/nano11071654
Antoja-Lleonart J, Ocelík V, Zhou S, de Hond K, Koster G, Rijnders G, Noheda B. Growth and Crystallization of SiO2/GeO2 Thin Films on Si(100) Substrates. Nanomaterials. 2021; 11(7):1654. https://doi.org/10.3390/nano11071654
Chicago/Turabian StyleAntoja-Lleonart, Jordi, Václav Ocelík, Silang Zhou, Kit de Hond, Gertjan Koster, Guus Rijnders, and Beatriz Noheda. 2021. "Growth and Crystallization of SiO2/GeO2 Thin Films on Si(100) Substrates" Nanomaterials 11, no. 7: 1654. https://doi.org/10.3390/nano11071654