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Journal: Nanomaterials, 2022
Volume: 12
Number: 2334

Article: Hafnium Oxide Nanostructured Thin Films: Electrophoretic Deposition Process and DUV Photolithography Patterning
Authors: by Vanessa Proust, Quentin Kirscher, Thi Kim Ngan Nguyen, Lisa Obringer, Kento Ishii, Ludivine Rault, Valérie Demange, David Berthebaud, Naoki Ohashi, Tetsuo Uchikoshi, Dominique Berling, Olivier Soppera and Fabien Grasset
Link: https://www.mdpi.com/2079-4991/12/14/2334

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