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Journal: Nanomaterials, 2022
Volume: 12
Number: 3349
3349
Article: Sensitivity of Inner Spacer Thickness Variations for Sub-3-nm Node Silicon Nanosheet Field-Effect Transistors
Authors: by Sanguk Lee, Jinsu Jeong, Jun-Sik Yoon, Seunghwan Lee, Junjong Lee, Jaewan Lim and Rock-Hyun Baek
Link: https://www.mdpi.com/2079-4991/12/19/3349

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