Pico-Watt Scanning Thermal Microscopy for Thermal Energy Transport Investigation in Atomic Materials
Abstract
:1. Introduction
2. Materials and Methods
2.1. Microelectromechanical System (MEMS) Process for Probe
2.2. Evaluation Experiment for Thermal Resolution of Probe
2.3. Quantitatitve Temperature Profile of the Metal Heater Line Sample
2.4. Measurements of Thermal Properties of HOPG through SThM
3. Results and Discussion
3.1. Composition and Principle of pW-SThM
3.2. Pico-Watt Thermal Resolution Probe Design and Fabrication
3.3. Time Constants and Thermal Resistance of the Probe
3.4. Temperature Resolution and Heat Resolution of the Probe
3.5. Quantitative Temperature Profile of the Metal Heater Line Sample
3.6. Measurement for Thermal Conductance of HOPG
4. Conclusions
Supplementary Materials
Author Contributions
Funding
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Koo, S.; Park, J.; Kim, K. Pico-Watt Scanning Thermal Microscopy for Thermal Energy Transport Investigation in Atomic Materials. Nanomaterials 2022, 12, 1479. https://doi.org/10.3390/nano12091479
Koo S, Park J, Kim K. Pico-Watt Scanning Thermal Microscopy for Thermal Energy Transport Investigation in Atomic Materials. Nanomaterials. 2022; 12(9):1479. https://doi.org/10.3390/nano12091479
Chicago/Turabian StyleKoo, Seunghoe, Jaehee Park, and Kyeongtae Kim. 2022. "Pico-Watt Scanning Thermal Microscopy for Thermal Energy Transport Investigation in Atomic Materials" Nanomaterials 12, no. 9: 1479. https://doi.org/10.3390/nano12091479