Characteristics of Hf0.5Zr0.5O2 Thin Films Prepared by Direct and Remote Plasma Atomic Layer Deposition for Application to Ferroelectric Memory
Abstract
:1. Introduction
2. Materials and Methods
2.1. HZO Thin Film Deposition by DPALD and RPALD Methods
2.2. Evaluation of the Properties of DP HZO and RP HZO Thin Films
3. Results and Discussion
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
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(a) DPALD | (b) RPALD | ||||
---|---|---|---|---|---|
TEMA-(Hf, Zr) 1:1 cycle | Pressure: 1.3 Torr | TEMA-(Hf, Zr) 1:1 cycle | Pressure: 1.7 Torr | ||
Source | Source | ||||
Ar Purge | Ar Purge | ||||
RF Plasma | RF Plasma | ||||
O2 Reactant | O2 Reactant |
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Hong, D.H.; Yoo, J.H.; Park, W.J.; Kim, S.W.; Kim, J.H.; Uhm, S.H.; Lee, H.C. Characteristics of Hf0.5Zr0.5O2 Thin Films Prepared by Direct and Remote Plasma Atomic Layer Deposition for Application to Ferroelectric Memory. Nanomaterials 2023, 13, 900. https://doi.org/10.3390/nano13050900
Hong DH, Yoo JH, Park WJ, Kim SW, Kim JH, Uhm SH, Lee HC. Characteristics of Hf0.5Zr0.5O2 Thin Films Prepared by Direct and Remote Plasma Atomic Layer Deposition for Application to Ferroelectric Memory. Nanomaterials. 2023; 13(5):900. https://doi.org/10.3390/nano13050900
Chicago/Turabian StyleHong, Da Hee, Jae Hoon Yoo, Won Ji Park, So Won Kim, Jong Hwan Kim, Sae Hoon Uhm, and Hee Chul Lee. 2023. "Characteristics of Hf0.5Zr0.5O2 Thin Films Prepared by Direct and Remote Plasma Atomic Layer Deposition for Application to Ferroelectric Memory" Nanomaterials 13, no. 5: 900. https://doi.org/10.3390/nano13050900