3.1. Composition and Growth Rate
SZO films with different Ag/Zn relative contents were deposited using the co-sputtering configuration previously mentioned.
Table 1 displays the deposition conditions and thicknesses of
as-grown SZO and after FLA films with different silver concentration. As
WAg is increased, the film thickness rises due to the higher amount of overall sputtered material. Interestingly, changes in the thickness are also observed upon FLA that will be discussed later.
RBS spectra and the corresponding simulation of
as-grown and after FLA SZO films produced with different
WAg are shown in
Figure 1a. The solid lines represent the simulations that reproduce the experimental data (dots), as calculated with SIMRA 7.07 software [
21]. The simulated sample structure allows for extracting the overall elemental compositional profiles. The vertical dot lines indicate the projectile scattering energies from the elemental constituents in the film located at the surface where heavier elements appear at higher energies. The signal from the same element detected at lower energies would imply that the scattering is produced at a certain depth. As expected, the RBS spectra reveal an overall increase in the Ag signal with
WAg. In addition, the intensity profile anticipates the presence of inhomogeneous in-depth elemental distributions (note that there is partial overlap of the Zn and Ag signals). The spectra also indicate the Ag enrichment at the near-surface region (higher energies), which becomes more pronounced with the Ag content (
WAg). In the case of the pure ZnO film, note the shrinkage of the Zn signal after FLA, which confirms the decrease in the thickness. In the Ag-containing films, FLA also induces changes in the elemental distribution.
Note that the compositional profile is rather complex with a partial overlap of the individual signals and, hence, the simulation of the spectra is not straightforward. The simulation has been performed by considering a number of sequential layers with varying compositions in order to reproduce the experimental data. For the sake of consistency, the number of layers has been kept to the minimum possible, and most spectra can be reliably reproduced with up to three layers. The extracted Ag in-depth profiles are shown in
Figure 1b. Here, both the trends in the Ag concentration and in the progressive Ag surface enrichment with
WAg are clearly evident in the
as-grown samples. It is also remarkable that, after FLA (top panel), the Ag distribution becomes more homogeneous.
The quantitative results from the RBS simulation are displayed in
Table 2. Here, the atomic incorporation rate has been extracted from the atomic areal density and the deposition time. We can clearly see the increase in the incorporation rate with
WAg as more material is sputtered. Note that the changes in the thickness observed after FLA (
Table 1) also reflect on the incorporation rate obtained via RBS. The average silver content within the film increases with the
WAg with values ranging from 3 to 17 at.% for
as-grown samples. In this case, there is a slight decrease in the Ag content after FLA. For pure ZnO, a nearly stoichiometric film is obtained. In addition, oxygen uptake seems to be related to the Ag content. This trend could be explained by the formation of a more porous structure as silver is increased. Indeed, this can be supported by the strong decrease in the film density for
WAg > 15 W. The density in the films was determined by the atomic areal density extracted from the RBS measurements (expressed in 10
15 at/cm
2) and the film thickness. For reference, the density value of bulk ZnO is 5.6 g/cm
3 [
22]. Note also the decrease (increase) in the density for low (high) Ag contents after FLA that will be discussed later.
3.2. Structural Analysis
Figure 2 shows the XRD patterns for the both SZO thin films,
as-grown (blue lines) and after FLA (red lines) with different Ag concentrations. The reflections from the reference spectra of wurtzite ZnO (JCPDS card no. 36-1451) and Ag (JCPDS card no. 04-0783) are also included for discussion. The undoped ZnO film has a hexagonal wurtzite structure with a dominant (002) reflection. It is also possible to observe the presence of a (103) peak. Note that the
y-axis of the graph is presented with a logarithmic scale to evidence possible weak peaks.
The film structure changes slightly with low Ag doping (
WAg ≤ 10 W). In this case, other weak diffraction peaks related to the ZnO structure appear, suggesting the formation of more randomly oriented grains through Ag incorporation. In addition, there is a narrowing of the (002) peak as extracted from the full-width at the half maximum (FWHM), indicating an improved crystallinity for low doping levels (see details in
Table 3). Within this Ag range (
WAg ≤ 10 W), no signal related to metallic silver or silver oxides was detected, indicating that silver does not segregate and could be incorporated into the ZnO matrix. This assumption is confirmed by the progressive shift of the (002) peak to lower Bragg angles with the silver content, suggesting the substitutional incorporation of Ag since its ionic radius (144 pm) is larger than that of Zn
2+ (135 pm). Apart from the shift, there is a progressive peak broadening that indicates that the wurtzite structure becomes distorted as more Ag is incorporated in the oxide matrix. The disruption of the hexagonal wurtzite-ZnO structure occurs for
WAg > 10 W, as the signal from the diffraction peaks related to this phase becomes broader and weaker, until it completely vanishes. Instead, new additional reflections ascribed to the cubic phase of metallic silver appear (indicated with blue asterisks), indicating the agglomeration or clustering of silver atoms.
After FLA, significant structural changes occur. First, for samples with no or very low Ag contents (
WAg ≤ 5 W) there is a narrowing of the (002) reflection from ZnO, indicating significant structural ordering. The appearance of additional ZnO reflections, with respect to the
as-grown samples, indicate that such ordering results in the formation of randomly oriented grains. The appearance of almost all ZnO peaks is also observed in all the films, indicating a general transformation towards a more stable ZnO-based (random) structure, which is noteworthy. This trend is accompanied by a redistribution of the Ag atoms after FLA in line with the RBS data, where less Ag is retained inside the ZnO grains as extracted from the shift of the (002) peaks to higher scattering angles. Accordingly, the intensity of Ag peaks increases with
WAg, and a randomly oriented wurtzite ZnO-based structure is formed. This situation reveals the presence of metallic Ag clusters as a secondary crystalline phase within the oxide matrix. The shift of the (002) peak to higher Bragg angles and its narrowing indicates a possible contraction in the interplanar distance, which could be an indication of higher compactness of the crystalline structure. The difference between the atomic radius of Ag
+ and Zn
2+ limits the solubility of Ag in the ZnO lattice site [
23]. Hence, Ag accommodation within the wurtzite phase after FLA seems to depend on the overall Ag content, and this effect is more evident for the sample grown with
WAg = 10 W. The estimated values of the lattice constants (
a and
c) obtained from the (002) and (103) planes, as well as the corresponding
c/a ratio, crystallite sizes and in-plane stress (
σ) of SZO films with low Ag contents, are presented in
Table 3.
The crystallite sizes of the wurtzite phase were calculated using Scherrer’s equation [
24], based on the broadening of the (002) peak. The grain size of the
as-grown films depends on the Ag content. The crystallites grow bigger with the increase in the Ag content and reach a maximum value of 25.50 nm. After FLA, the crystallite sizes were further increased to 14.53 nm for the undoped ZnO film and to 29.72 nm for
WAg = 5 W. Then, it decreased to 19.67 nm for
WAg = 10 W. Similar trends have been found after FLA for other doping elements in ZnO, such as in the case of aluminum [
25]. The lattice parameters for the ZnO wurtzite structure were calculated from the position of the XRD reflections. These values are comparable to the lattice constants of ZnO bulk (
C0) at 5.206 Å [
22]. The evolution of lattice parameters for the films with low Ag contents are also shown in
Table 3. All deposited SZO films showed
c parameter values slightly higher than those of unstressed ZnO, indicating that the unit cells are more elongated along the
c-axis. This effect is higher as the Ag content increases. On the contrary, after FLA, all the SZO films show a decrease in the
c parameter, with values slightly lower than in the (relaxed) wurtzite ZnO structure. Note that the decrease is higher as the Ag content increases.
It is well established that the lattice distortions due to the defects (vacancies, interstitials, substitutions, local structure transformations, etc.) may cause strain in the films. Depending on the type of strain in the crystal, i.e., tensile or compressive strain, the peak position shifts towards higher or lower angles, respectively [
26]. For the hexagonal crystal structure, the in-plane stress (
σ) of the films can be calculated using the biaxial strain model [
27]:
σ = −450·(
C0 −
C)/
C0, where
C0 (5.206 Å) is the unstrained lattice constant for the powder reference [
22], and
C is the lattice constant that was obtained experimentally. The negative sign in biaxial stress (
σ) values indicated that all the
as-grown SZO films were in a state of compressive stress. Depending on the size of the foreign impurity atom and the size of the host atom, the compressive stress may increase or decrease [
28]. It is seen from
Table 3 that the stress in as-
as-grown SZO films showed a tendency to increase with the rise in the Ag content. After FLA, the internal stress turns into a tensile state. The change in stress upon FLA can be attributed to the promotion of interstitial oxygen as suggested by Gupta et al. [
29]. Moreover, different thermal expansion coefficients (
α) between Si (
αSi ~ 3 × 10
−6 K
−1) and ZnO that have different expansions along different axes (
αZnO-a ~ 6.5 × 10
−6 K
−1 along the
a-axis and
αZnO-a ~ 3.7 × 10
−6 K
−1 along the
c-axis) may play a role. During the FLA process, the lattice parameter of ZnO along the
a-axis expands more than that along the
c-axis, and for the
a-axis, the expansion is much bigger than for Si. The heating rate for ms-range annealing is about 5 × 10
4 K/s, and the cooling rate is about 20 K/s. Due to this fast cooling rate, the lattice extension of the unit cell is maintained (bigger along the
a-axis than for the
c-axis) causing in-plane tensile strain. The same phenomenon is observed for Ge thin films (
αGe ~ 6 × 10
−6 K
−1) grown on Si [
30]. In the
as-grown state, the Ge layer is compressive strained, while after fast cooling, the significant difference in
α between Ge and Si frustrates the shrinkage of Ge and the grown layer becomes tensile strained. The biaxial tensile stress in the films is found to be slightly increased by the silver incorporation (see
Table 3).
3.3. Morphological Study
It is well known that ZnO films deposited normal to the substrate exhibit a columnar microstructure oriented perpendicular to the silicon substrate [
31]. The back-scattered electron (BSE) signal from the cross-section view of the
as-grown SZO and after FLA films with different silver contents are displayed in
Figure 3. In this case, the image contrast provides additional compositional information, since a brighter signal can be related to the presence of heavier elements. Initially, for very low silver contents (
WAg = 5 W), the significant presence of bright spots (related to small Ag aggregates) started to appear taped throughout the columnar structures. Increasing the Ag content in the films grown at
WAg = 10 W leads to a more pronounced segregation of silver particles towards the ZnO surface, in agreement with the RBS data. Note also the preferential formation of well-defined silver-rich regions on the edges of the ZnO columns. When the silver content is higher (
WAg ≥ 15 W), the topography and microstructure of the films are quite different. First, no columnar structure is observed, and it is possible to appreciate three distinct layers with a presumably different composition, as evidenced by the change in the image contrast. A proposed structure, in accordance with the RBS results, consists of a superficial layer of mainly silver (brighter), an intermediate layer of Ag and ZnO and a deeper layer richer in ZnO.
After FLA, SZO films with low silver doping evidence a severe atomic diffusion, promoting the agglomeration of silver and formation of larger particles. In particular, for
WAg = 10 W, a significant migration of silver towards the grain interfaces (between columns) is observed, accompanied by a substantial increase in the size of the Ag particles. Note that this process seems to leave the formation of voids in the films, resulting in open pores that could be relevant for the PC activity. The formation of these voids can also be related to the thickness increase after FLA. The growth and agglomeration of silver particles after FLA can be attributed to the Ostwald ripening mechanism [
32] where larger particles grow at the expense of smaller ones due to differences in their surface energy. The high temperature influences Ostwald ripening due to its effect on interfacial energy, coefficients of the growth rate and solubility [
33]. When the Ag content is higher (
WAg ≥ 15 W), FLA promotes extensive diffusion and the reorganization of atoms (a substantial decrease in thickness is also observed), leading to the formation of a single mixed layer.
The top-view SEM images of SZO films with different silver contents are shown in
Figure 4. It is clear that the surface morphology changes considerably with the Ag incorporation. The undoped ZnO film presents a dense granular structure composed of relatively large grains (40 ± 5 nm) that can be ascribed to the columnar growth. For very low Ag doping (
WAg = 5 W), a morphological transition to a more porous structure is observed. The absence of defined silver particles on the surface suggests limited Ag agglomeration and, hence, a uniform distribution of Ag within the ZnO matrix. The subsequent increase in the doping for
WAg = 10 W results in pronounced silver accumulation on the surface, overshadowing the ZnO structure. A further increase in the doping level (
WAg = 15 W) leads to the formation of silver patches on the surface. After FLA for low Ag dopings (
WAg ≤ 10 W), it is evident that the empty space between the grains increases, which, as indicated above, can be related to a higher porosity. This change is due to the silver segregation and redistribution along the columns, similarly to the behavior reported by R. Francq et al. [
34]. In particular, it is observed that, in the film with
WAg = 10 W, the oxide grains are revealed after FLA as a result of silver migration from the surface (as previously noted in the cross-sectional images). An inset corresponding to a high-contrast BSE image of the region marked in red is provided for distinguishing both phases (Ag and ZnO). Regions of silver are detected, but no longer on the surface and rather embedded within the columns. Increasing the Ag content (
WAg = 15 W) results in a larger particle size accompanied by a dense array of Ag nanoparticles on the sample surface.
3.4. Optical Properties
Figure 5a shows the optical transmittance spectra of the full set of
as-grown SZO films on sapphire. Undoped ZnO and low-Ag-content films (
WAg ≤ 10 W) show good optical transmittance values of 75–85% over the whole range of visible wavelengths. It is obvious that, with a rising Ag doping content, the transmittance gradually decreases until it reaches a fixed value below 40% (
WAg ≥ 15 W), revealing the more metallic character of the films. In order to calculate the band-gap energy (
Eg), one of the methods mostly used is based on the Tauc model [
35]. In this case,
Eg is extracted from the following expression:
αhv~(hv-Eg)n, where
α is the optical absorption coefficient,
h is Planck’s constant,
v is the frequency of radiation and the exponent
n depends on the nature of optical transition. In the present case,
n = 2, since the optical absorption edge is commonly described by an allowed direct transition. The
Eg of the SZO film can be estimated by plotting (
αhv)
2 vs.
hν and extrapolating the best linear fit with the abscissa axis.
Figure 5b shows the corresponding Tauc plots with the variation in
Eg as a function of the Ag contents. The calculated
Egs are listed as the inset in
Figure 5b. Compared to the undoped ZnO film with an
Eg of ~3.30 eV, the optical absorption edge exhibits a red-shift with the rise in Ag doping content up to
WAg = 10 W. The narrowing of
Eg could be due to the incorporation of Ag
+ into the ZnO matrix, altering the band structure, as supported by the XRD data. Ag atoms play an important role as an acceptor to decrease the
Eg of ZnO [
36]. However,
Eg increases for
WAg ≥ 15 W as a result of the disruption of the wurtzite structure and the diffusion of Ag particles towards the ZnO surface, as observed via XRD and SEM.
Since FLA has been applied to films grown on silicon substrates, reflectivity has been used to study the impact of the thermal treatment in the optical properties. The reflectance spectra of
as-grown and after FLA SZO films are shown in
Figure 6a. The broad strong intense absorption edge position around 370 nm, characteristic of ZnO direct band-gap transition, is related to the charge-transfer mechanisms from the valence band state to the conduction band states of the ZnO interface. The presence of interference fringes is also indicative of the transparency of the films, which is maintained for
WAg ≤ 10 W. Silver incorporation reveals a distinctive peak at 310 nm due to interband transition in Ag nanoparticles, which becomes more pronounced upon the Ag increase [
37]. A noticeable broad band at 450 nm is associated with the SPR peaking of metallic Ag particles [
38]. The blueshift of this band can often indicate structural and electronic modifications. In order to calculate the
Eg from the reflectance spectra, we have considered the Kubelka–Munk function (
FKM) given by the following expression [
39]:
FKM(
R) = (1 −
R)
2/2
R, where
R is the reflection coefficient obtained from the spectra. The linear part of the curve was extrapolated to
FKM = 0 to obtain the
Eg of the films. It is worth mentioning that the
Eg of the
as-grown films, calculated using this method, match those calculated using the Tauc method (they are not included here).
Figure 6b shows the
Eg plot calculated from the corresponding reflectance spectra using the Kubelka–Munk method in the case of FLA samples. The resulting plots show that the absorption edge after FLA generally shifts towards lower energies, which may be attributed to the Ag redistribution and/or change in the stress state from compressive to tensile, as suggested by the XRD results. In any case, the decrease in
Eg after the thermal treatment is in agreement with the report of Tran et al. [
40]. However, the film with
WAg = 10 W displays an increase in the
Eg from 2.95 to 3.20 eV after FLA.
3.5. Photocatalytic Activity
The PC activity of all SZO thin films was evaluated based on MO degradation under UV–vis irradiation with a light bulb. It is important to mention that, regardless of the Ag content, all the
as-grown SZO films (i.e., untreated with FLA) do not exhibit any significant PC activity. This suggests that FLA is crucial for activating the PC activity in the films, which can be attributed to the structural and morphological changes described above.
Figure 7 shows the reaction kinetics for different SZO films. The slope of the curves (
k) can be related to the first-order rate constant for the degradation process, for which values are also indicated in the figure. Here, the ZnO films become photoactive after FLA, which can be related to the ordering increase in the wurtzite structure. Noteworthy, the samples with low Ag contents (
WAg ≤ 10 W) show the major increase in the photoactivity, with a maximum yield for
WAg = 10 W. For higher Ag contents (
WAg ≥ 15 W), the films are photoactive but the yield decreases with respect to the other SZO samples and is even lower when compared with the undoped ZnO case.
Taking into consideration the preliminary results shown in
Figure 7, the best samples were further evaluated with an increase in the irradiation time to 95 h and comprising larger sample areas to increase the contact effective surface and to be able to estimate the degradation kinetics more accurately. The PC conditions were kept identical as in the first experiment.
Figure 8 shows the irradiation time dependence of the MO photodegradation process. After 95 h of irradiation, the best photocatalytic result was again attained in the film with
WAg = 10 W, reaching up to~93% of the MO concentration reduction.
Based on the structural and optical properties reported here, the superior photoactivity in SZO samples after FLA can be ascribed to the combination of structural ordering of the wurtzite matrix, enhanced optical absorption by the band-gap narrowing and agglomeration (plasmonic effect) of Ag, together with significant porosity. Obviously, the out-diffusion of Ag and formation of the metal-rich surface layer at high doping levels seems to be detrimental for the PC activity, which may be related to a masking effect of Ag on ZnO-based grains preventing or blocking the presence of PC active sites on the sample surface. On the other hand, it has been observed that the wettability of the samples is dependent on the Ag content (i.e., the wettability can be tuned with the Ag content) [
17]. In this case, the films change from hydrophobic (
CA = 124°) to hydrophilic (
CA = 85°) upon FLA, which can be relevant to explain the PC activation. This improved wettability allows for faster and more effective contact between the surface of the material and the dye to be degraded, resulting in early photoactivity. Thus, the process is not delayed by the time needed for more hydrophobic samples to become wet. Moreover, the surface roughness values (4 ± 2 nm rms) determined via optical profilometry show only small deviations between all samples. So, this parameter does not seem to be an important factor to explain the different PC behavior with the Ag content.
Therefore, it is confirmed that the good PC properties are based on a compromise between the ZnO structure and the percentage of silver, reaching the maximum PC when the balance between the non-defective structure and the defects generated by the silver doping are in the right ratio. The PC process depends on the light absorption efficiency, crystallinity and surface area [
41,
42], and by optimizing these factors, the efficiency of semiconductor photocatalysts can be significantly improved, leading to better performance in applications, such as water splitting and pollutant degradation, among others. Also, a good balance between these factors is desirable to improve the photoactivity. If we analyze these parameters in detail, we can say the following: (i) light absorption efficiency determines how well the semiconductor can absorb photons to generate electron–hole pairs. Materials with a broad absorption spectrum, especially in the visible range, are more efficient. Enhancing light absorption can be achieved by doping or creating heterojunctions and, in our case, silver incorporation does so. (ii) High crystallinity typically means fewer defects, which can act as recombination centers for electron–hole pairs. Better crystallinity improves charge carrier mobility, leading to more efficient PC reactions. For that reason, the higher content of silver, the more defects in the structure, and therefore, this causes a reduction in photoactivity. (iii) A larger surface area provides more active sites for the photocatalytic reactions. Nanostructured materials, such as nanoparticles or nanorods, often exhibit higher surface areas, enhancing their photocatalytic performance. In our case, due to the morphological characteristics of our surfaces, this is improved with respect to the bulk material. The mechanism behind the PC degradation activity of SZO samples can also be sustained on the formation of an heterostructure, as explained in the following. In this way, there are three possible electron-transfer mechanisms [
43] at the metal–semiconductor interface as depicted in
Figure 9. Electron transfer through these mechanisms would mitigate the recombination of charge carriers and, hence, they become available to participate in the PC process.
In order to confirm the proposed PC mechanisms, the impact of FLA on the defect structure of the wurtzite phase has been addressed via Raman spectroscopy. In this case, we focus on low Ag contents where we have obtained the higher PC, and obviously, the wurtzite structure is maintained upon doping. It is well known that wurtzite ZnO has eight sets of characteristic optical phonon modes at the center of the Brillouin zone (
Г point), given in equation [
44]:
Г =
1A1 + 2
B1 + 1
E1 + 2
E2, where
A1 and
E1 modes are polar and split into the transverse optical mode (TO) and a longitudinal optical mode (LO).
E2 mode consists of
E2 (low) associated with the vibration of the oxygen atom and
E2 (high) related to a heavy Zn sublattice. In addition, the
B1 modes are generally not Raman active.
Figure 10 shows the Raman spectra of
as-grown (left) and FLA (right) samples. The undoped ZnO film presents a characteristic phonon mode situated at 438 cm
−1 assigned to the vibrational mode
E2H related to the crystalline nature, phase orientation and strain state present in the ZnO matrix [
45]. The intensity of this peak decreases and broadens with Ag incorporation, which indicates a more disordered wurtzite structure in line with the XRD results. Additionally, the Raman peak at 486 cm
−1 exclusively appeared for Ag-doped ZnO, due to the interfacial surface phonon mode [
38].
After FLA, the
A1(TO) and
A1(LO) polar branches appeared at about 380 and 570 cm
−1, respectively, for Ag-doped ZnO. The
A1(LO) mode is commonly related to the presence of defects, assigned to oxygen vacancies and zinc interstitials in ZnO. These defects seem to be promoted with the Ag content. In addition, it is observed that in the film with
WAg = 10 W, a complementary peak appears: a broad Raman peak at 241 cm
−1 attributed to the local vibrational mode (LVM) [
46]. This feature is accompanied by an intense peak at 705 cm
−1, which may be related to the local vibrational mode of the defect/impurity in Ag-doped ZnO [
47]. Accordingly, as discussed above, this situation would support the good PC activity of the FLA film with
WAg = 10 W towards MO degradation under UV–vis irradiation. Therefore, the good PC properties rely on a compromise between the quality of the ZnO structure and the percentage of silver. Under this framework, the maximum photoactivity would be reached as a result of the balance between the non-defective wurtzite structure and the defects generated by the silver doping.