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Journal: Nanomaterials, 2025
Volume: 15
Number: 343
Article:
High-Breakdown and Low-Leakage 4H-SiC MOS Capacitor Based on HfO2/SiO2 Stacked Gate Dielectric in Trench Structures
Authors:
by
Qimin Huang, Yunduo Guo, Anfeng Wang, Lin Gu, Zhenyu Wang, Chengxi Ding, Yi Shen, Hongping Ma and Qingchun Zhang
Link:
https://www.mdpi.com/2079-4991/15/5/343
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