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Journal: Coatings, 2020
Volume: 10
Number: 647
Article:
Reactive Sputtering Deposition of Epitaxial TiC Film on Si (100) Substrate
Authors:
by
Yu-Siang Fang, Thi Hien Do, Kun-An Chiu, Wei-Chun Chen and Li Chang
Link:
https://www.mdpi.com/2079-6412/10/7/647
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