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Volume 12
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Article

Correlation between Thickness and Optical Properties in Nanocrystalline γ-Monoclinic WO3 Thin Films

by
Renee J. Sáenz-Hernández
1,2,*,
Guillermo M. Herrera-Pérez
3,*,
Jesús S. Uribe-Chavira
1,
María C. Grijalva-Castillo
3,
José Trinidad Elizalde-Galindo
2 and
José A. Matutes-Aquino
1
1
Materials Physics Department, Centro de Investigación en Materiales Avanzados, Miguel de Cervantes 120, Chihuahua 31136, Chih., Mexico
2
Instituto de Ingeniería y Tecnología, Universidad Autónoma de Ciudad Juárez, Av. Del Charro 450 Norte, Ciudad Juárez 32310, Chih., Mexico
3
CONACYT—Centro de Investigación en Materiales Avanzados, S.C., Miguel de Cervantes 120, Chihuahua 31136, Chih., Mexico
*
Authors to whom correspondence should be addressed.
Coatings 2022, 12(11), 1727; https://doi.org/10.3390/coatings12111727
Submission received: 14 October 2022 / Revised: 3 November 2022 / Accepted: 9 November 2022 / Published: 12 November 2022
(This article belongs to the Special Issue Optical Properties of Crystals and Thin Films)
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Abstract

Results from the analysis of the variation of structural defects, such as oxygen vacancies indicate that by adjusting the thickness of the WO3 films, fabricated by DC reactive sputtering, it is possible to modulate the oxygen vacancies concentration. This has a tremendous influence on the applications of these semiconductor materials. The thicknesses analyzed here are 42, 66, and 131 nm. After the annealing process at 500 °C, films were directly transformed to a stable γ-monoclinic crystal structure with P21/n space group, with a preferential orientation in the (200) plane. Atomic force microscopy exhibits nanometer range particle size with the highest roughness and higher surface area for the thinner film. FTIR analysis shows the presence of characteristic bands of the double bond stretching vibrational modes (W=O) and stretching vibrations of the γ(W-O-W) bonds corresponding to the monoclinic WO3. Raman bands located at 345, and 435 cm−1 are ascribed to the presence of W5+ species that induces the formation of oxygen vacancies VO. The thinner film shows a decrease in the optical indirect band gap attributed to the formation of oxygen vacancies in combination with W5+ species that induce the formation of energy states within the forbidden band gap range.
Keywords: thin films; thicknesses; oxygen vacancies; structural defects; tungsten trioxide; optical properties; microstructural properties; semiconductor; DC reactive sputtering thin films; thicknesses; oxygen vacancies; structural defects; tungsten trioxide; optical properties; microstructural properties; semiconductor; DC reactive sputtering

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MDPI and ACS Style

Sáenz-Hernández, R.J.; Herrera-Pérez, G.M.; Uribe-Chavira, J.S.; Grijalva-Castillo, M.C.; Elizalde-Galindo, J.T.; Matutes-Aquino, J.A. Correlation between Thickness and Optical Properties in Nanocrystalline γ-Monoclinic WO3 Thin Films. Coatings 2022, 12, 1727. https://doi.org/10.3390/coatings12111727

AMA Style

Sáenz-Hernández RJ, Herrera-Pérez GM, Uribe-Chavira JS, Grijalva-Castillo MC, Elizalde-Galindo JT, Matutes-Aquino JA. Correlation between Thickness and Optical Properties in Nanocrystalline γ-Monoclinic WO3 Thin Films. Coatings. 2022; 12(11):1727. https://doi.org/10.3390/coatings12111727

Chicago/Turabian Style

Sáenz-Hernández, Renee J., Guillermo M. Herrera-Pérez, Jesús S. Uribe-Chavira, María C. Grijalva-Castillo, José Trinidad Elizalde-Galindo, and José A. Matutes-Aquino. 2022. "Correlation between Thickness and Optical Properties in Nanocrystalline γ-Monoclinic WO3 Thin Films" Coatings 12, no. 11: 1727. https://doi.org/10.3390/coatings12111727

APA Style

Sáenz-Hernández, R. J., Herrera-Pérez, G. M., Uribe-Chavira, J. S., Grijalva-Castillo, M. C., Elizalde-Galindo, J. T., & Matutes-Aquino, J. A. (2022). Correlation between Thickness and Optical Properties in Nanocrystalline γ-Monoclinic WO3 Thin Films. Coatings, 12(11), 1727. https://doi.org/10.3390/coatings12111727

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