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Journal: Coatings, 2022
Volume: 12
Number: 1807

Article: Prediction of Target Erosion for Planar Magnetron Sputtering Systems
Authors: by Alexander Kolesnikov, Yury Kryukov, Marat Gafurov and Viktor Bodnarchuk
Link: https://www.mdpi.com/2079-6412/12/12/1807

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