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Journal: Coatings, 2022
Volume: 12
Number: 158
Article:
Towards Investigating Surface Quality of Single-Crystal Silicon Optics Polished with Different Processes
Authors:
by
Laixi Sun, Yubin Zhang, Xiaoyan Zhou, Miaomiao Duan, Xin Ye, Weihua Li, Yaguo Li and Liming Yang
Link:
https://www.mdpi.com/2079-6412/12/2/158
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