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        Journal: Coatings, 2023
        Volume: 13 
                	Number: 91 
                
        
        Article:
        Spectroscopic Analysis of NF3 Plasmas with Oxygen Additive for PECVD Chamber Cleaning 
        Authors: 
       	by
                    Surin An and Sang Jeen Hong        
        Link:
        https://www.mdpi.com/2079-6412/13/1/91
        
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