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MDPIMDPI
Journal: CoatingsVolume: 13Number: 310
Article: Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture
  • Authors:
  • Evgeniya Ermakova1,*,
  • Alexey Kolodin2 and
  • Marina Kosinova1,*
  • et al.
Link: https://www.mdpi.com/2079-6412/13/2/310

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