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Volume 13
Issue 8
10.3390/coatings13081448
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Article
Peer-Review Record

Energy Distribution of Sputtered Atoms Explored by SRIM Simulations

Coatings 2023, 13(8), 1448; https://doi.org/10.3390/coatings13081448
by Nastja Mahne 1,2, Miha Čekada 1 and Matjaž Panjan 1,*
Reviewer 1: Anonymous
Reviewer 3:
GuoLing Li
Coatings 2023, 13(8), 1448; https://doi.org/10.3390/coatings13081448
Submission received: 26 July 2023 / Revised: 4 August 2023 / Accepted: 10 August 2023 / Published: 17 August 2023
(This article belongs to the Section Surface Characterization, Deposition and Modification)

Round 1

Reviewer 1 Report

The manuscript entitled “Energy Distribution of Sputtered Atoms Explored by SRIM Simulations” reported a SRIM simulations to analyze the energy distribution functions and average energies of sputtered atoms for relevant sputtering materials. The experimental data and results are very complex, a lot of simulations are provided by the authors. The conclusion section is well described and the novelty is evidenced. Such manuscript is publishable on Coatings if some minor issues have been corrected.

 What was the motivation of target materials for SRIM analysis?

Could you point out the novelty of this work by comparing your results with the other techniques?

 Please, use more recent references.

Author Response

Please see the attachment.

Author Response File: Author Response.docx

Reviewer 2 Report

The paper reports about the energy and angular distributions of sputtered atoms derived from SRIM simulations. The subject is well worth of investigation and the results appear original and of great interest for the involved scientific community. The paper is well organized, the results are clearly reported and the conclusions are well supported by the data. In conclusion, the paper is of good quality, of great interest for the involved researchers and, in my opinion, can be published in the present form.

Author Response

Please see the attachment.

Author Response File: Author Response.docx

Reviewer 3 Report

The content of the article is quite substantial, but there are some issues that need to be improved.

1、  In section 2, SRIM program should be introduced, rather than simply citing other people's literature.

2、  What is the practical significance of this simulation calculation for atoms sputtering experiments?

3、  How to determine the accuracy of simulation calculations? Authors should compare it with experimental data.

4、  The clarity of Figure 1 needs to be improved.

5、  What does the box mean in Figure 10?

Fine.

Author Response

Please see the attachment.

Author Response File: Author Response.docx

Round 2

Reviewer 3 Report

Can be published.

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