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Journal: Coatings, 2023
Volume: 13
Number: 1550

Article: Reactive Sputter Deposition of Ga2O3 Thin Films Using Liquid Ga Target
Authors: by Marcell Gajdics, Miklós Serényi, Tamás Kolonits, Attila Sulyok, Zsolt Endre Horváth and Béla Pécz
Link: https://www.mdpi.com/2079-6412/13/9/1550

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