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Journal: Coatings, 2024
Volume: 14
Number: 38

Article: Machine Learning Modeling and Run-to-Run Control of an Area-Selective Atomic Layer Deposition Spatial Reactor
Authors: by Matthew Tom, Henrik Wang, Feiyang Ou, Gerassimos Orkoulas and Panagiotis D. Christofides
Link: https://www.mdpi.com/2079-6412/14/1/38

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