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Journal: Coatings, 2024
Volume: 14
Number: 1162
Article:
Integration of Self-Assembled Monolayers for Cobalt/Porous Low-k Interconnects
Authors:
by
Yi-Lung Cheng, Joe Kao, Hao-Wei Zhang, Bo-Jie Liao, Giin-Shan Chen and Jau-Shiung Fang
Link:
https://www.mdpi.com/2079-6412/14/9/1162
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