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Volume 15
Issue 2
10.3390/coatings15020241
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Article

Thick Tetrahedral Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc

by
Qingyan Hou
1,*,
Pan Pang
1,2,
Yifan Zhang
1,
Xu Zhang
2,
Bin Liao
2,3,
Lin Chen
3,* and
Xiaoyue Jin
1,*
1
Institute of Radiation Technology, Beijing Academy of Science and Technology, Beijing 100875, China
2
Key Laboratory of Beam Technology of Ministry of Education, School of Physics and Astronomy, Beijing Normal University, Beijing 100875, China
3
Laboratory of Beam Technology and Energy Materials, Faculty of Arts and Sciences, Beijing Normal University, Zhuhai 519087, China
*
Authors to whom correspondence should be addressed.
Coatings 2025, 15(2), 241; https://doi.org/10.3390/coatings15020241
Submission received: 24 January 2025 / Revised: 14 February 2025 / Accepted: 17 February 2025 / Published: 18 February 2025
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Abstract

High-quality diamond-like carbon (DLC) films are renowned for their exceptional hardness, low friction coefficient, and superior chemical stability. These properties make DLC films exceptionally suitable for protective coatings in optical, mechanical, aerospace, and military applications. Thick DLC films with outstanding mechanical properties were deposited on DC53 die steel using a mixed energy carbon plasma generated by a filtered cathodic vacuum arc (FCVA) device. The structural, mechanical, tribological, and optical properties of the films were tested by Raman, surface morphology instrument, Vickers Indenter, tribometer, and UV-VIS spectrophotometry. The results indicated that 14 µm tetrahedral amorphous carbon (ta-C) films with a good combination with DC53 die steel substrate were obtained. The hardness was 9415 HV, which is close to that of diamond films. The fracture toughness was 4 MPa·m1/2. The friction coefficient was 0.0898, and the optical band gap was 3.12 eV.
Keywords: FCVA; tetrahedral amorphous carbon; thick film; hardness FCVA; tetrahedral amorphous carbon; thick film; hardness

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MDPI and ACS Style

Hou, Q.; Pang, P.; Zhang, Y.; Zhang, X.; Liao, B.; Chen, L.; Jin, X. Thick Tetrahedral Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc. Coatings 2025, 15, 241. https://doi.org/10.3390/coatings15020241

AMA Style

Hou Q, Pang P, Zhang Y, Zhang X, Liao B, Chen L, Jin X. Thick Tetrahedral Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc. Coatings. 2025; 15(2):241. https://doi.org/10.3390/coatings15020241

Chicago/Turabian Style

Hou, Qingyan, Pan Pang, Yifan Zhang, Xu Zhang, Bin Liao, Lin Chen, and Xiaoyue Jin. 2025. "Thick Tetrahedral Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc" Coatings 15, no. 2: 241. https://doi.org/10.3390/coatings15020241

APA Style

Hou, Q., Pang, P., Zhang, Y., Zhang, X., Liao, B., Chen, L., & Jin, X. (2025). Thick Tetrahedral Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc. Coatings, 15(2), 241. https://doi.org/10.3390/coatings15020241

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