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Journal: Coatings, 2017
Volume: 7
Number: 148

Article: Deposition and Patterning of Polycrystalline Diamond Films Using Traditional Photolithography and Reactive Ion Etching
Authors: by Stepan Linnik, Vitalii Okhotnikov and Alexander Gaydaychuk
Link: https://www.mdpi.com/2079-6412/7/9/148

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