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Journal: Coatings, 2018
Volume: 8
Number: 413
413
Article: Growth of Atomic Layer Deposited Ruthenium and Its Optical Properties at Short Wavelengths Using Ru(EtCp)₂ and Oxygen
Authors: by Robert Müller, Lilit Ghazaryan, Paul Schenk, Sabrina Wolleb, Vivek Beladiya, Felix Otto, Norbert Kaiser, Andreas Tünnermann, Torsten Fritz and Adriana Szeghalmi
Link: https://www.mdpi.com/2079-6412/8/11/413

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