Next Article in Journal
Antimicrobial Paper Coatings Containing Microencapsulated Cymbopogon citratus Oil
Previous Article in Journal
Compositional, Optical and Electrical Characteristics of SiOx Thin Films Deposited by Reactive Pulsed DC Magnetron Sputtering
 
 
Search for Articles:
Title / Keyword
Author / Affiliation / Email
Journal
Article Type
 
 
Advanced Search
 
Section
Special Issue
Volume
Issue
Number
Page
 
Journals
Coatings
Volume 9
Issue 8
10.3390/coatings9080469
coatings-logo
Submit to this Journal Review for this Journal Propose a Special Issue
► Article Menu

Article Menu

share Share announcement Help format_quote Cite question_answer Discuss in SciProfiles
first_page
settings
Order Article Reprints
Font Type:
Arial Georgia Verdana
Font Size:
Aa Aa Aa
Line Spacing:
Column Width:
Background:
Article

Structural Characteristics and Photoluminescence Properties of Sputter-Deposition ZnGa2O4 Thin Films on Sapphire and Si(100) Substrates

by
Wei-Kai Wang
1,*,
Yi-Jie Xu
1,
Shih-Yung Huang
2,
Kuo-Feng Liu
3 and
Pi-Chuen Tsai
3
1
Department of Materials Science and Engineering, Da-Yeh University, Changhua 51591, Taiwan
2
Department of Industrial Engineering and Management, Da-Yeh University, Changhua 51591, Taiwan
3
Graduate Institute of Materials Science and Green Energy Engineering, National Formosa University, Huwei, Yunlin 632, Taiwan
*
Author to whom correspondence should be addressed.
Coatings 2019, 9(8), 469; https://doi.org/10.3390/coatings9080469
Submission received: 20 June 2019 / Revised: 19 July 2019 / Accepted: 23 July 2019 / Published: 25 July 2019
Browse Figures
Versions Notes

Abstract

In this paper, we report the growth and material characteristics of ZnGa2O4 thin films on c-plane sapphire and Si(100) substrates by a radio-frequency magnetron sputtering. When deposited on sapphire, the ZnGa2O4 film showed a polycrystalline nature and a less randomly oriented, primarily with the (111), (222) and (511) planes parallel to the substrate surface. On Si(100), the ZnGa2O4 thin film was randomly oriented with (311)- and (020)-plane polycrystalline properties. Transmission electron microscopy analysis revealed that an amorphous-layer interface was formed on the Si(100) substrate and the microstructure of ZnGa2O4 became disordered. The ZnGa2O4/sapphire emitted ultraviolet photoluminescence and green emissions. The dominant optical transitions depended on the deposition temperature, oxygen and Zn contents, and nature of the substrate. The structural and optical properties of sputter-deposited ZnGa2O4 thin film on sapphire indicated that sapphire substrate is suitable for the growth of crystalline, high-quality ZnGa2O4 thin film.
Keywords: film; magnetron sputtering; microstructure film; magnetron sputtering; microstructure

Share and Cite

MDPI and ACS Style

Wang, W.-K.; Xu, Y.-J.; Huang, S.-Y.; Liu, K.-F.; Tsai, P.-C. Structural Characteristics and Photoluminescence Properties of Sputter-Deposition ZnGa2O4 Thin Films on Sapphire and Si(100) Substrates. Coatings 2019, 9, 469. https://doi.org/10.3390/coatings9080469

AMA Style

Wang W-K, Xu Y-J, Huang S-Y, Liu K-F, Tsai P-C. Structural Characteristics and Photoluminescence Properties of Sputter-Deposition ZnGa2O4 Thin Films on Sapphire and Si(100) Substrates. Coatings. 2019; 9(8):469. https://doi.org/10.3390/coatings9080469

Chicago/Turabian Style

Wang, Wei-Kai, Yi-Jie Xu, Shih-Yung Huang, Kuo-Feng Liu, and Pi-Chuen Tsai. 2019. "Structural Characteristics and Photoluminescence Properties of Sputter-Deposition ZnGa2O4 Thin Films on Sapphire and Si(100) Substrates" Coatings 9, no. 8: 469. https://doi.org/10.3390/coatings9080469

APA Style

Wang, W.-K., Xu, Y.-J., Huang, S.-Y., Liu, K.-F., & Tsai, P.-C. (2019). Structural Characteristics and Photoluminescence Properties of Sputter-Deposition ZnGa2O4 Thin Films on Sapphire and Si(100) Substrates. Coatings, 9(8), 469. https://doi.org/10.3390/coatings9080469

Note that from the first issue of 2016, this journal uses article numbers instead of page numbers. See further details here.

Article Metrics

Back to TopTop