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Journal: Electronics, 2022
Volume: 11
Number: 176
Article:
Peculiarities of the Acoustic Wave Propagation in Diamond-Based Multilayer Piezoelectric Structures as “Me1/(Al,Sc)N/Me2/(100) Diamond/Me3” and “Me1/AlN/Me2/(100) Diamond/Me3” under Metal Thin-Film Deposition
Authors:
by
Gennady Kvashnin, Boris Sorokin, Nikita Asafiev, Viacheslav Prokhorov and Andrei Sotnikov
Link:
https://www.mdpi.com/2079-9292/11/2/176
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