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Journal: PhotonicsVolume: 9Number: 839
Article: Process Optimization Based on Analysis of Dynamic and Static Performance Requirements of Ion Beam Figuring Machine Tools for Sub-Nanometer Figuring
- Authors:
- Yongbin Wang1,2,3,
- Hao Hu1,2,3 and
- Yifan Dai1,2,3
- et al.
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