Monitoring the Etching Process in LPFGs towards Development of Highly Sensitive Sensors †
Abstract
:1. Introduction
2. Materials and Methods
3. Results
4. Discussion and Conclusions
Acknowledgments
Conflicts of Interest
References
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Villar, I.D.; Cruz, J.L.; Socorro, A.B.; Diaz, S.; Corres, J.M.; Arregui, F.J.; Matias, I.R. Monitoring the Etching Process in LPFGs towards Development of Highly Sensitive Sensors. Proceedings 2017, 1, 331. https://doi.org/10.3390/proceedings1040331
Villar ID, Cruz JL, Socorro AB, Diaz S, Corres JM, Arregui FJ, Matias IR. Monitoring the Etching Process in LPFGs towards Development of Highly Sensitive Sensors. Proceedings. 2017; 1(4):331. https://doi.org/10.3390/proceedings1040331
Chicago/Turabian StyleVillar, Ignacio Del, Jose Luis Cruz, Abian Bentor Socorro, Silvia Diaz, Jesus Maria Corres, Francisco Javier Arregui, and Ignacio Raul Matias. 2017. "Monitoring the Etching Process in LPFGs towards Development of Highly Sensitive Sensors" Proceedings 1, no. 4: 331. https://doi.org/10.3390/proceedings1040331
APA StyleVillar, I. D., Cruz, J. L., Socorro, A. B., Diaz, S., Corres, J. M., Arregui, F. J., & Matias, I. R. (2017). Monitoring the Etching Process in LPFGs towards Development of Highly Sensitive Sensors. Proceedings, 1(4), 331. https://doi.org/10.3390/proceedings1040331