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Journal: Proceedings, 2017
Volume: 1
Number: 380
Article:
Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films
Authors:
by
Martin Fischeneder, Martin Oposich, Michael Schneider and Ulrich Schmid
Link:
https://www.mdpi.com/2504-3900/1/4/380
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