Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device †
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Köck, A.; Deluca, M.; Sosada-Ludwikowska, F.; Maier, G.; Teubenbacher, R.W.; Sagmeister, M.; Rohracher, K.; Wachmann, E.; Niehaus, J.S.; Becker, S.; et al. Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device. Proceedings 2019, 14, 5. https://doi.org/10.3390/proceedings2019014005
Köck A, Deluca M, Sosada-Ludwikowska F, Maier G, Teubenbacher RW, Sagmeister M, Rohracher K, Wachmann E, Niehaus JS, Becker S, et al. Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device. Proceedings. 2019; 14(1):5. https://doi.org/10.3390/proceedings2019014005
Chicago/Turabian StyleKöck, Anton, Marco Deluca, Florentyna Sosada-Ludwikowska, Günther Maier, Robert Wimmer Teubenbacher, Martin Sagmeister, Karl Rohracher, Ewald Wachmann, Jan Steffen Niehaus, Sören Becker, and et al. 2019. "Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device" Proceedings 14, no. 1: 5. https://doi.org/10.3390/proceedings2019014005