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Journal: Proceedings, 2024
Volume: 97
Number: 223
Article:
Thermal Behavior of Biaxial Piezoelectric MEMS Scanner
Authors:
by
Laurent Mollard, Christel Dieppedale, Antoine Hamelin, François Gardien, Gwenael Le Rhun, Jean Hue, Laurent Frey and Gael Castellan
Link:
https://www.mdpi.com/2504-3900/97/1/223
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