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Volume 15
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10.3390/mi15081011
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Review

Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review

by
Chenguang Xin
1,2,3,*,
Yingkun Xu
1,
Zhongyao Zhang
1 and
Mengwei Li
1,2,*
1
School of Instrument and Electronics, North University of China, Taiyuan 030051, China
2
School of Instrument and Intelligent Future Technology, North University of China, Taiyuan 030051, China
3
State Key Laboratory of Extreme Photonics and Instrumentation, Zhejiang University, Hangzhou 310007, China
*
Authors to whom correspondence should be addressed.
Micromachines 2024, 15(8), 1011; https://doi.org/10.3390/mi15081011
Submission received: 25 July 2024 / Accepted: 1 August 2024 / Published: 6 August 2024
(This article belongs to the Special Issue Realizing Optical Control through Mechatronics Systems)
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Abstract

High-precision displacement sensing has been widely used across both scientific research and industrial applications. The recent interests in developing micro-opto-electro-mechanical systems (MOEMS) have given rise to an excellent platform for miniaturized displacement sensors. Advancement in this field during past years is now yielding integrated high-precision sensors which show great potential in applications ranging from photoacoustic spectroscopy to high-precision positioning and automation. In this review, we briefly summarize different techniques for high-precision displacement sensing based on MOEMS and discuss the challenges for future improvement.
Keywords: MOEMS; displacement; optical sensing MOEMS; displacement; optical sensing

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MDPI and ACS Style

Xin, C.; Xu, Y.; Zhang, Z.; Li, M. Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review. Micromachines 2024, 15, 1011. https://doi.org/10.3390/mi15081011

AMA Style

Xin C, Xu Y, Zhang Z, Li M. Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review. Micromachines. 2024; 15(8):1011. https://doi.org/10.3390/mi15081011

Chicago/Turabian Style

Xin, Chenguang, Yingkun Xu, Zhongyao Zhang, and Mengwei Li. 2024. "Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review" Micromachines 15, no. 8: 1011. https://doi.org/10.3390/mi15081011

APA Style

Xin, C., Xu, Y., Zhang, Z., & Li, M. (2024). Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review. Micromachines, 15(8), 1011. https://doi.org/10.3390/mi15081011

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