Micro-positioning
A special issue of Micromachines (ISSN 2072-666X).
Deadline for manuscript submissions: closed (31 December 2010) | Viewed by 314
Special Issue Editor
Interests: actuator systems, manufacturing and machine design with application focus on precision engineering, micromechanical systems, and robot assisted surgery
Special Issue Information
Dear Colleagues,
Micropositioning is a key technology in micro and precision engineering technology. It is present in our immediate environment, from hard discs to camera systems as well as in the most sophisticated lab equipment, be it in SEM micropositoning stages or in the most advanced wafer steppers. Micropositioning is not just ‘small’ positioning. The effects of scale are clearly showing up with surface related forces becoming dominant in the smaller world. This poses major problems in controlling accurate motion. Small size might lead someone to the assumption that smaller scales and lower masses enable higher bandwidths and faster motion. Partially this is true but for some other applications the situation is somewhat troubled. When the system scales down but the total requested stroke is remaining the same, smaller scale lead to less ‘driving power (due to smaller motor volume) facing more important frictional forces. Higher resolution position measurement leads to very high data rates, a problem also emerging in high precision metrology and manufacturing. This special issue aims at attracting and publishing the latest work on micropositioning.
Dominiek Reynaerts, Ph.D.
Guest Editor
Keywords
- micropositioning
- nanomotion
- motion control
- micro-actuators
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