Search Results (10)

A conventional microchannel plate framing camera is typically utilized for inertial confinement fusion diagnosis. However, as a vacuum electronic device, it has inherent limitations, such as a complex structure and the inability to achieve single-line-of-sight imaging. To address these challenges, a CMOS image sensor that can be seamlessly integrated with an electronic pulse broadening system can provide a viable alternative to the microchannel plate detector. This paper introduces the design of an 8 × 8 pixel-array ultrashort shutter-time single-framing CMOS image sensor, which leverages silicon epitaxial processing and a 0.18 μm standard CMOS process. The focus of this study is on the photodiode and the readout pixel-array circuit. The photodiode, designed using the silicon epitaxial process, achieves a quantum efficiency exceeding 30% in the visible light band at a bias voltage of 1.8 V, with a temporal resolution greater than 200 ps for visible light. The readout pixel-array circuit, which is based on the 0.18 μm standard CMOS process, incorporates 5T structure pixel units, voltage-controlled delayers, clock trees, and row-column decoding and scanning circuits. Simulations of the pixel circuit demonstrate an optimal temporal resolution of 60 ps. Under the shutter condition with the best temporal resolution, the maximum output swing of the pixel circuit is 448 mV, and the output noise is 77.47 μV, resulting in a dynamic range of 75.2 dB for the pixel circuit; the small-signal responsivity is 1.93 × 10⁻⁷ V/e⁻, and the full-well capacity is 2.3 Me⁻. The maximum power consumption of the 8 × 8 pixel-array and its control circuits is 0.35 mW. Considering both the photodiode and the pixel circuit, the proposed CMOS image sensor achieves a temporal resolution better than 209 ps. Full article

This paper presents a MEMS electrochemical angular accelerometer with a silicon-based four-electrode structure, which was made of thousands of interconnected microchannels for electrolyte flow, anodes uniformly coated on structure surfaces and cathodes located on the sidewalls of flow holes. From the perspective of device fabrication, in this study, the previously reported multi-piece assembly was simplified into single-piece integrative manufacturing, effectively addressing the problems of complex assembly and manual alignment. From the perspective of the sensitive structure, in this study, the silicon-based four-electrode structure featuring with complete insulation layers between anodes and cathodes can enable fast electrochemical reactions with improved sensitivities. Numerical simulations were conducted to optimize the geometrical parameters of the silicon-based four-electrode structure, where increases in fluid resistance and cathode area were found to expand working bandwidths and improve device sensitivity, respectively. Then, the silicon-based four-electrode structure was fabricated by conventional MEMS processes, mainly composed of wafer-level bonding and wafer-level etching. As to device characterization, the MEMS electrochemical angular accelerometer with the silicon-based four-electrode structure exhibited a maximum sensitivity of 1458 V/(rad/s²) at 0.01 Hz and a minimum noise level of −164 dB at 1 Hz. Compared with previously reported electrochemical angular accelerometers, the angular accelerometer developed in this study offered higher sensitivities and lower noise levels, indicating strong potential for applications in the field of rotational seismology. Full article

Blood testing is a crucial application in the field of clinical studies for disease diagnosis and screening, biomarker discovery, organ function assessment, and the personalization of medication. Therefore, it is of the utmost importance to collect precise data in a short time. In this study, we utilized Raman spectroscopy to analyze blood samples for the extraction of comprehensive biological information, including the primary components and compositions present in the blood. Short-wavelength (532 nm green light) Raman scattering spectroscopy was applied for the analysis of the blood samples, plasma, and serum for detection of the biological characteristics in each sample type. Our results indicated that the whole blood had a high hemoglobin content, which suggests that hemoglobin is a major component of blood. The characteristic Raman peaks of hemoglobin were observed at 690, 989, 1015, 1182, 1233, 1315, and 1562–1649 cm⁻¹. Analysis of the plasma and serum samples indicated the presence of β-carotene, which exhibited characteristic peaks at 1013, 1172, and 1526 cm⁻¹. This novel 3D silicon micro-channel device technology holds immense potential in the field of medical blood testing. It can serve as the basis for the detection of various diseases and biomarkers, providing real-time data to help medical professionals and patients better understand their health conditions. Changes in biological data collected in this manner could potentially be used for clinical diagnosis. Full article

Micro electro-mechanical systems (MEMS) combining sensing and microfluidics functionalities, as are common in Lab-on-Chip (LoC) devices, are increasingly based on polymers. Benefits of polymers include tunable material properties, the possibility of surface functionalization, compatibility with many micro and nano patterning techniques, and optical transparency. Often, additional materials, such as metals, ceramics, or silicon, are needed for functional or auxiliary purposes, e.g., as electrodes. Hybrid patterning and integration of material composites require an increasing range of fabrication approaches, which must often be newly developed or at least adapted and optimized. Here, a microfabrication process concept is developed that allows one to implement attenuated total reflection Fourier transform infrared spectroscopy (ATR-FTIR) and electrochemistry on an LoC device. It is designed to spatially resolve chemical sensitivity and selectivity, which are instrumental for the detection of chemical distributions, e.g., during on-flow chemical and biological reaction chemistry. The processing sequence involves (i) direct-write and soft-contact UV lithography in SUEX dry resist and replication in polydimethylsiloxane (PDMS) elastomers as the fluidic structure; (ii) surface functionalization of PDMS with oxygen plasma, 3-aminopropyl-triethoxysilane (APTES), and a UV-curable glue (NOA 73) for bonding the fluidic structure to the substrate; (iii) double-sided patterning of silicon nitride-coated silicon wafers serving as the ATR-FTIR-active internal reflection element (IRE) on one side and the electrode-covered substrate for microfluidics on the back side with lift-off and sputter-based patterning of gold electrodes; and (iv) a custom-designed active vacuum positioning and alignment setup. Fluidic channels of 100 μm height and 600 μm width in 5 mm thick PDMS were fabricated on 2” and 4” demonstrators. Electrochemistry on-chip functionality was demonstrated by cyclic voltammetry (CV) of redox reactions involving iron cyanides in different oxidation states. Further, ATR-FTIR measurements of laminar co-flows of H₂O and D₂O demonstrated the chemical mapping capabilities of the modular fabrication concept of the LoC devices. Full article

Herein, we report a helium ion-bombardment enhanced etching method for silicon nanofabrication without the use of resists; furthermore, we demonstrate its unique advantages for straightforward fabrication on irregular surfaces and prototyping nano-electro-mechanical system devices, such as self-enclosed Si nanofluidic channels and mechanical nano-resonators. This method employs focused helium ions to selectively irradiate single-crystal Si to disrupt the crystal lattice and transform it into an amorphous phase that can be etched at a rate 200 times higher than that of the non-irradiated Si. Due to the unique raindrop shape of the interaction volumes between helium ions and Si, buried Si nanofluidic channels can be constructed using only one dosing step, followed by one step of conventional chemical etching. Moreover, suspended Si nanobeams can be fabricated without an additional undercut step for release owing to the unique raindrop shape. In addition, we demonstrate nanofabrication directly on 3D micro/nano surfaces, such as an atomic force microscopic probe, which is challenging for conventional nanofabrication due to the requirement of photoresist spin coating. Finally, this approach can also be extended to assist in the etching of other materials that are difficult to etch, such as silicon carbide (SiC). Full article

Mode-division multiplexing (MDM) is an attractive solution for future on-chip networks to enhance the optical transmission capacity with a single laser source. A mode-division reconfigurable optical add/drop multiplexer (ROADM) is one of the key components to construct flexible and complex on-chip optical networks for MDM systems. In this paper, we report on a novel scheme of mode-division ROADM with mode-selective silicon photonic MEMS (micro-electromechanical system) switches. With this ROADM device, data carried by any mode-channels can be rerouted or switched at an MDM network node, i.e., any mode could be added/dropped to/from the multimode bus waveguide flexibly and selectively. Particularly, the design and simulation of adiabatic vertical couplers for three quasi-TE modes (TE₀, TE₁, and TE₂ modes) based on effective index analysis and mode overlap calculation method are reported. The calculated insertion losses are less than 0.08 dB, 0.19 dB, and 0.03 dB for the TE₀ mode, TE₁ mode, and TE₂ mode couplers, respectively, over a wavelength range of 75 nm (1515–1590 nm). The crosstalks are below −20 dB over the bandwidth. The proposed device is promising for future on-chip optical networks with flexible functionality and large-scale integration. Full article

This paper presents a novel concept for the co-design of microwave heaters and microfluidic channels for sub-microliter volumes in continuous flow microfluidics. Based on the novel co-design concept, two types of heaters are presented, co-designed and manufactured in high-resistivity silicon-glass technology, resulting in a building block for consumable and mass-producible micro total analysis systems. Resonant and non-resonant co-planar waveguide transmission line heaters are investigated for heating of sub-micro-liter liquid volumes in a channel section at 25 GHz. The heating rates of 16 and 24 °C/s are obtained with power levels of 32 dBm for the through line and the open-ended line microwave heater, respectively. The heating uniformity of developed devices is evaluated with a Rhodamine B and deionized water mixture on a micrometer scale using the microwave-optical measurement setup. Measurement results showed a good agreement with simulations and demonstrated the potential of microwave heating for microfluidics. Full article

Optical filters have been adopted in many applications such as reconfigurable telecommunication switches, tunable lasers and spectral imaging. However, most of commercialized filters based on a micro-electrical-mechanical system (MEMS) only provide a minimum bandwidth of 25 GHz in telecom so far. In this work, the programmable filter based on a digital micromirror device (DMD) experimentally demonstrated a minimum bandwidth of 12.5 GHz in C-band that matched the grid width of the International Telecommunication Union (ITU) G.694.1 standard. It was capable of filtering multiple wavebands simultaneously and flexibly by remotely uploading binary holograms onto the DMD. The number of channels and the center wavelength could be adjusted independently, as well as the channel bandwidth and the output power. The center wavelength tuning resolution of this filter achieved 0.033 nm and the insertion loss was about 10 dB across the entire C-band. Since the DMD had a high power handling capability (25 KW/cm²) of around 200 times that of the liquid crystal on silicon (LCoS) chip, the DMD-based filters are expected to be applied in high power situations. Full article

This paper describes the impact of a physical immobilization methodology, using plasma polymerized 1,1,3,3, tetramethyldisiloxane, on the catalytic performance of β-galactosidase from Aspergillus oryzae in a microfluidic device. The β-galactosidase was immobilized by a polymer coating grown by Plasma Enhanced Chemical Vapor Deposition (PEVCD). Combined with a microchannel patterned in the silicone, a microreactor was obtained with which the diffusion through the plasma polymerized layer and the hydrolysis of a synthetic substrate, the resorufin-β-d-galactopyranoside, were studied. A study of the efficiency of the immobilization procedure was investigated after several uses and kinetic parameters of immobilized β-galactosidase were calculated and compared with those of soluble enzyme. Simulation and a modelling approach were also initiated to understand phenomena that influenced enzyme behavior in the physical immobilization method. Thus, the catalytic performances of immobilized enzymes were directly influenced by immobilization conditions and particularly by the diffusion behavior and availability of substrate molecules in the enzyme microenvironment. Full article

The development and growth of microfluidics has been mainly based on various novel fabrication techniques for downsizing and integration of the micro/nano components. Especially, an effective fabrication technique of three-dimensional structures still continues to be strongly required in order to improve device performance, functionality, and device packing density because the conventional lamination-based technique for integrating several two-dimensional components is not enough to satisfy the requirement. Although three-dimensional printers have a high potential for becoming an effective tool to fabricate a three-dimensional microstructure, a leak caused by the roughness of a low-precision structure made by a 3D printer is a critical problem when the microfluidic device is composed of several parts. To build a liquid-tight microchannel on such a low-precision structure, we developed a novel assembly technique in which a paraffin polymer was used as a mold for a microchannel of photo-curable silicone elastomer on a rough surface. The shape and roughness of the molded microchannel was in good agreement with the master pattern. Additionally, the seal performance of the microchannel was demonstrated by an experiment of electrophoresis in the microchannel built on a substrate which has a huge roughness and a joint. Full article