Search Results (65)

Aerostatic spindles are indispensable in the ultra-precision manufacturing field due to their high accuracy and low friction. However, rotor manufacturing errors will affect the thickness and uniformity of the air film, thereby limiting the improvement and application of the aerostatic spindle. To explore this issue, this paper presents theoretical modelling and experimental work. Rotor cylindricity errors were first evaluated based on manufacturing errors, and a calculation model of the film thickness considering rotor cylindricity errors was established. By solving the dynamic Reynolds equation considering cylindricity errors, the dynamic stiffness and damping of aerostatic spindles were obtained. The influence mechanism of rotor cylindricity errors on the dynamic stiffness and damping coefficients of the rotor–bearing system was revealed. The stiffness coefficients K_xx, K_yy, and K_xy are more sensitive to the saddle-shaped errors, and the stiffness coefficient K_yx and both damping coefficients are more closely related to bucket-shaped errors. Regarding the influence of the cylindricity errors’ extremal position, the main and cross stiffness coefficients are sensitive to saddle-shaped errors and bucket-shaped errors, respectively; the main and cross-damping coefficients are sensitive to bucket-shaped errors. Under the effect of three kinds of error shapes, when the rotor cylindricity errors value is less than 1 μm, the dynamic stiffness and damping coefficients are conducive to improving the dynamic characteristics of the rotor–bearing system. Multiple rotors were manufactured, and their cylindricity errors were measured, and then the dynamic characteristics of the assembled aerostatic spindles with these rotors were tested. It was found that the dynamic stiffness of spindles with saddle-shaped errors is larger than that of spindles with conical-shaped errors, and the greater the error values are, the worse the rotation accuracy. The experimental results are consistent with the theoretical findings, thus verifying the feasibility and validity of the established theoretical model. This study improves the error tolerance design accuracy of rotors and thereby enhances the dynamic performance of aerostatic spindles. Full article

To address the issues of sealing leakage and airflow-induced vibration in high-speed turbomachinery, a conical straight-tooth annular clearance sealed hybrid aerostatic/aerodynamic bearing is investigated. A three-dimensional CFD model is established to study the effects of radial clearance height, inlet pressure, rotor speed, and eccentricity on pressure distribution, velocity distribution, and leakage rate. The results show that leakage exhibits a strong positive nonlinear correlation with clearance height and inlet pressure, following a power-law or polynomial relationship, while rotor speed and eccentricity exert negligible effects (less than 5%). The underlying mechanisms are identified as the kinetic energy diversion caused by circumferential shear and the mutual cancelation of throttling and backflow effects. Increasing the gap height enhances leakage by expanding the hydraulic diameter and strengthening vortex disturbance; increasing inlet pressure promotes leakage by elevating the driving force and intensifying local flow separation. Full article

With the increasing demand for higher efficiency in semiconductor machining, air spindles with compensation systems have attracted growing attention. The pneumatic nozzle–cylindrical flapper is a promising sensing approach due to its high precision and suitability for displacement measurement of high-speed rotating bodies. However, its complex three-dimensional flow behavior leads to significant deviations from conventional nozzle–flat flapper models, limiting its practical application. This study aims to clarify the flow mechanisms governing the nozzle–cylindrical flapper system and to establish a reliable framework for predicting its static characteristics. A computational fluid dynamics model is developed to analyze gas flow within the micron-scale clearance under varying gap sizes and angular orientations, and the results are validated against experimental measurements. The analysis shows that curvature plays a dominant role in the flow behavior. Increasing curvature enhances inertia-driven acceleration and weakens viscous effects while simultaneously inducing strong recirculation due to flow wrapping around the cylindrical surface. These competing mechanisms explain the observed deviations from conventional models and cannot be captured by two-dimensional approaches. Based on the numerical results, a mass flow rate compensation coefficient is introduced and correlated with the momentum compensation coefficient. A quadratic relationship between the two coefficients is identified, indicating a common recirculation-driven mechanism. These findings support previous semi-empirical assumptions and provide a basis for predicting static characteristics with reduced reliance on experimental calibration. Full article

With the widespread use of high-speed motorized spindles in precision machining, conventional contact loading methods are no longer adequate for stiffness loading tests under high-speed operating conditions. Non-contact loading technology based on a partial-arc aerostatic radial bearing offers an effective alternative. In this study, a CFD-based hydrodynamic model was developed for the gas-film flow field in a partial-arc aerostatic radial bearing. The effects of bearing geometric parameters, such as chamber configuration, supply-orifice structure, and eccentricity, on loading characteristics were investigated. The influence of hydrodynamic effects under high-speed rotation on the loading force stability and stiffness-testing accuracy was analyzed, and an asymmetric shallow–deep composite chamber design was proposed to mitigate these effects. The results indicate that the partial-arc aerostatic radial bearing, designed based on both static characteristics and rotational performance analysis, can effectively suppress hydrodynamic effects and improve loading force stability and stiffness-testing accuracy. Full article

This paper presents the results of a study of the dynamic performance of an aerostatic thrust bearing with a microgroove and simple diaphragms. The objective of this study was to determine the influence of the lubrication gap thickness and the volume of the microgroove and pockets on the structural dynamics. Unlike most studies that typically use the second-order harmonic oscillator equation as the characteristic equation, the root criteria are determined with high accuracy when the characteristic equation is of an order no lower than the fourth order. The presented formulas allow one to find the optimal calculated dimensional gap, microgroove and pocket volume in terms of the best dynamic performance. For a well-damped thrust bearing, the required response speed and sufficient stability margin can only be achieved within a narrow range of 1–2 times the bearing gap volume. Calculations have shown that to ensure satisfactory thrust bearing dynamics, the calculated gap should not exceed 10–15 µm. Full article

Aerostatic bearings incorporating micro-hole restrictors with diameters on the order of tens of microns demonstrate superior static and dynamic stiffness characteristics, while significantly reducing air consumption, and are increasingly adopted in precision engineering applications. This paper investigates the modelling of aerostatic bearings with micro-hole restrictors. First, a refined discharge coefficient formula is developed, incorporating the orifice length-to-diameter ratio effect using the computational fluid dynamics (CFD) simulation results on a centrally fed circular aerostatic bearing. A numerical solution scheme is proposed using the developed discharge coefficients to enable more accurate and efficient prediction of the bearing performance and flow characteristics. Finally, the proposed numerical approach is implemented using the finite difference method (FDM) and demonstrated through a circular thrust air bearing case study. The results are validated against both CFD simulations and experimental measurements, showing excellent agreement and confirming the reliability of the FDM-based numerical model. Numerical and experimental investigations consistently demonstrate that micro-hole-restricted air bearings can achieve both high load capacity and high stiffness, having the potential for application in more complex air bearing designs and systems. Full article

In micro-production technology (MPT), the demand for ultra-precise machine tools has been steadily increasing. Conventional guideway systems, such as hydrostatic or aerostatic bearings, often face limitations in terms of compactness, media supply, and susceptibility to external disturbances, which restrict their applicability in next-generation precision manufacturing. In order to address these challenges, this paper presents a novel media-free, contactless, and active three-degree-of-freedom (DOF) planar positioning (guiding) system that integrates ultrasonic actuators with electromagnetic actuators. The hybrid concept combines the high load capacity and self-stabilization of double-acting ultrasonic actuators and pronounced controllability of the electromagnetic actuators. A prototype system was developed and experimentally validated. Ultrasonic actuators successfully established a stable levitation state, while electromagnetic actuators provided fine adjustment of the levitation height in the micrometer range. Load tests demonstrated that the system maintained stable levitation under an external load of 30 N. These results confirm the feasibility of the proposed approach for robust and precise positioning. The developed hybrid system therefore represents the potential for next-generation precise manufacturing machines in MPT, offering high accuracy and robustness against external disturbances. Full article

To increase semiconductor production yield and meet the growing global demand, air bearings offering higher processing speeds and reduced friction losses have been proposed as an ideal solution. However, due to the non-contact support characteristic of air bearings, challenges such as shaft displacement caused by processing resistance inevitably arise. As an engineering requirement, the shaft must restrict lateral deflection to within 30 μm under transverse force. In our previous research, a compensation system using a nozzle–flapper mechanism as a displacement sensor was proposed to address shaft displacement. The effectiveness of the nozzle–flapper system in measuring shaft displacement was validated at rotational speeds up to 20,000 rpm. Furthermore, the compensation system’s ability to maintain the shaft’s initial position under a 5 N external force was verified in related collaborative research. In this study, building upon prior work, we further analyze the system characteristics of the cylindrical nozzle–flapper. This includes modeling the geometric space formed by the specific shape of the cylindrical flapper and nozzle and proposing an airflow hypothesis based on this geometry. The hypothesis is incorporated into the theoretical model of a standard nozzle–flapper system, resulting in an optimized theoretical method applicable to cylindrical configurations. Experimental results validating the effectiveness of the proposed model are also presented. Full article

Aerostatic conical bearings with micro-orifices (ACBMOs) can simultaneously withstand both radial and axial external loads and have high power density. Nevertheless, due to the larger surface-to-volume ratio and length-to-diameter ratio of micro-orifices, the gas flow through micro-orifices is more susceptible to frictional loss. Since frictional loss in micro-orifices has been ignored in the literature, an aerostatic conical bearing lubrication model with frictional loss in micro-orifices and a transient model of their nonlinear dynamics are established. The effects of the micro-orifice length-to-diameter ratio and relative roughness on lubrication performance, nonlinear behaviors, and ACBMO–rotor system stability are investigated, followed by experimental validation. The results indicate that the gas mass flow rate of the micro-orifices, gas film pressure, and load capacity in the ACBMOs decrease with the increase in micro-orifice relative roughness and length-to-diameter ratio, which cannot be observed in the conventional model without frictional loss. Meanwhile, both the onset speed of instability and the failure speed decrease when frictional loss occurs in micro-orifices are considered. Full article

To develop a new porous metal for aerostatic bearing, herein, novel porous thin plates (PTPs) with micron-scale porous structures are fabricated. The pore size distribution and air permeability of PTPs are measured. A tensile test is carried out and the fractography is observed. The load capacity and stiffness of aerostatic bearings utilizing PTPs as porous restrictors are tested. The results show that the phenomenon of the uneven distribution of powders can be significantly improved by decreasing the roller speed. Fine powder porous thin plates (FPTPs) effectively balance permeability and mechanical properties, achieving an ultimate tensile strength of 157 MPa while maintaining favorable permeability, significantly exceeding existing porous restrictors. Aerostatic bearings employing PTPs as restrictors demonstrate substantial load capacity and stiffness. Notably, aerostatic bearings utilizing coarse powder porous thin plates (CPTPs) as restrictors deliver 511 N load capacity and 22 N/μm stiffness with a considerably smaller porous restrictor area. It is worth noting that the novel PTPs not only exhibit a straightforward and environmentally friendly manufacturing process but also preserve the micron-scale porous structure while meeting the practical requirements of aerostatic bearings, holding significant promise for gas lubrication applications. Full article

Advancements in manufacturing technology have facilitated the use of micro-orifice restrictors (MORs) in aerostatic bearings. However, the understanding of their effectiveness in journal bearings remains limited. This study utilizes FEM for solving the nonlinear Reynolds equation, incorporating velocity terms, to analyze the characteristics of aerostatic journal bearings (AJBs). The concepts of air impedance and pressure range are introduced and applied to explain the advantages of MORs over traditional orifice restrictors (TORs). Furthermore, the centrifugal deformation of the air film induced by high-speed operations and its consequential impact on bearing performance are methodically examined in detail. Finally, an experimental study is executed to confirm the proposed model and support the pertinent design principles. The experiment indicates that the air film thickness, accounting for centrifugal deformation, aligns more closely with the high-speed operating conditions characteristic of AJBs. Full article

Aerostatic bearings were proven to be an optimal choice in situations where low friction, cleanliness, and high motion accuracy are required. Their functionality relies heavily on flow restrictors, which are responsible for regulating and controlling the supply flow, and consequently, the thickness and stiffness of the fluid film. A diverse range of restrictors with varying characteristics is used, among which are the porous restrictors. The current work introduces a novel solution involving a porous, highly compressible restrictor, whose element of novelty compared to its predecessors consists of its variable thickness and corresponding permeability, regulated by the load on the bearing. The gas is supplied through an annular, elastic, deformable, porous disc, which is compressed by a metal plate, subjected to compression by the recess pressure on one side and by the supply pressure on the other side. One or more springs are used in parallel with the porous disc to obtain the optimum elastic response. The objective of this study is to evaluate the performance characteristics and compare them to a conventional restrictor. A parametric analysis is performed to define the size and properties of the porous restrictor. Full article

As the core component of ultra-precision machine tools, the manufacturing errors of aerostatic spindles are inevitable due to the limitations of machining and assembly processes, and these errors significantly affect the spindle’s static and dynamic performance. To address this issue, a force model of the unbalanced air film, considering the straightness errors of the rotor’s radial and thrust surfaces, was constructed. Unlike conventional studies that rely solely on idealized error assumptions, this research integrates actual straightness measurement data into the simulation process, enabling a more realistic and precise prediction of bearing performance. Rotors with different tolerance specifications were fabricated, and static performance simulations were carried out based on the measured geometry data. An experimental setup was built to evaluate the performance of the aerostatic spindle assembled with these rotors. The experimental results were compared with the simulation outcomes, confirming the validity of the proposed model. To further quantify the influence of straightness errors on the static characteristics of aerostatic spindles, ideal functions were used to define representative manufacturing error profiles. The results show that a barrel-shaped error on the radial bearing surface can cause a load capacity variation of up to 46.6%, and its positive effect on air film load capacity is more significant than that of taper or drum shapes. For the thrust bearing surface, a concave-shaped error can lead to a load capacity variation of up to 13.4%, and its enhancement effect is superior to those of the two taper and convex-shaped errors. The results demonstrate that the straightness errors on the radial and thrust bearing surfaces are key factors affecting the radial and axial load capacities of the spindle. Full article

The force conditions experienced by spacecraft and astronauts in space are vastly different from those in Earth’s gravitational environment, hence it is necessary to conduct adequate micro-low-gravity environment simulation tests on the ground before launch. In this paper, an overview is provided of the current status of micro-low-gravity simulation test technology for spacecraft based on hydrostatic air-bearing. The paper systematically organizes the application of hydrostatic air-bearing technology in micro-low-gravity simulation tests, such as the deployment of space mechanisms, spacecraft GNC (Guidance, Navigation, and Control), on-orbit operations of space manipulators, and astronaut training. It summarizes the principles of air-flotation micro-low-gravity simulation technology in different scenarios and distills suitable solutions for various requirements. Finally, the paper looks forward to the development trends of air-flotation micro-low-gravity simulation test technology and proposes key technical challenges that need to be overcome in aerostatic bearing. Full article

Micro-hole aerostatic bearings have emerged as critical components in ultra-precision machining systems, offering a superior load capacity, stiffness, and stability compared to traditional orifice-based designs. These enhancements are primarily attributed to the high-density configurations of micro-holes and the reduction in hole diameter. However, research on the design and analysis of micro-hole aerostatic bearings for high-rotational-speed applications remains limited. In this study, the finite element method (FEM) was employed to solve the Reynolds equation, thereby conducting a systematic evaluation of the static and high-speed performance characteristics of micro-hole aerostatic thrust bearings. The effects of restrictor types, micro-hole layouts, structural parameters, and centrifugal deformation under high-rotational-speed conditions on bearing performance have been comprehensively examined. The objective of this study is to provide a basis for the design of micro-hole high-speed aerostatic spindles. Full article