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Keywords = cylindrical resonator gyroscope

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13 pages, 4899 KB  
Article
Design and Experiment for N = 3 Wineglass Mode Metal Cylindrical Resonator Gyroscope Closed-Loop System
by Xiaolin Guo, Rang Cui, Shaochen Yan, Qi Cai, Wenqiang Wei, Chong Shen and Huiliang Cao
Electronics 2023, 12(1), 131; https://doi.org/10.3390/electronics12010131 - 28 Dec 2022
Cited by 2 | Viewed by 2541
Abstract
This paper studies a kind of gyro structure of N = 3 Wineglass Mode Metal Cylindrical Resonator Gyroscope (WMMCRG). Compared with traditional Cylindrical Vibrating Gyroscope (CVG), the designed structure has higher scale factor and lower frequency split. This paper provides a more specific [...] Read more.
This paper studies a kind of gyro structure of N = 3 Wineglass Mode Metal Cylindrical Resonator Gyroscope (WMMCRG). Compared with traditional Cylindrical Vibrating Gyroscope (CVG), the designed structure has higher scale factor and lower frequency split. This paper provides a more specific processing method and the parameters of resonator materials. A closed-loop controlling system with low error and low noise is designed for WMMCRG. The system is composed of three independent closed-loop systems: drive closed-loop, sensing closed-loop, and quadrature error correction closed-loop. Through the test of the high-precision turntable, under the premise of the same material and processing technology, the bias instability, bias stability, zero bias, Angular Random Walk (ARW), and frequency split of WMMCRG is 1.974°/h, 10.869°/h, 10.3323°/s, 16 (°)/√h, 0.02 Hz, respectively. Full article
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12 pages, 4843 KB  
Article
Simulations and Experiments on the Vibrational Characteristics of Cylindrical Resonators with First Three Harmonic Errors
by Chen Liang, Kaiyong Yang, Yao Pan, Yunfeng Tao, Jingyu Li, Shilong Jin and Hui Luo
Micromachines 2022, 13(10), 1679; https://doi.org/10.3390/mi13101679 - 6 Oct 2022
Cited by 4 | Viewed by 2156
Abstract
A cylindrical resonator gyroscope is a kind of Coriolis gyroscope, which measures angular velocity or angle via processing of the standing wave. The symmetry of a cylindrical resonator is destroyed by different degrees of geometric nonuniformity and structural damage in the machining process. [...] Read more.
A cylindrical resonator gyroscope is a kind of Coriolis gyroscope, which measures angular velocity or angle via processing of the standing wave. The symmetry of a cylindrical resonator is destroyed by different degrees of geometric nonuniformity and structural damage in the machining process. The uneven mass distribution caused by the asymmetry of the resonator can be expressed in the form of a Fourier series. The first three harmonics will reduce the anti-interference ability of the resonator to the external vibration, as well as increase the angular random walk and zero-bias drift of the gyroscope. In this paper, the frequency split of different modes caused by the first three harmonic errors and the displacement of the center of the cylindrical resonator bottom plate are obtained by simulation, and the relationship between them is explored. The experimental results on five fused silica cylindrical resonators are consistent with the simulation, confirming the linear relationship between the n = 1 frequency split and second harmonic error. A method for evaluating the first three harmonic errors of fused silica cylindrical resonators is provided. Full article
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8 pages, 1397 KB  
Article
Experimental Study on Variation of Surface Roughness and Q Factors of Fused Silica Cylindrical Resonators with Different Grinding Speeds
by Libin Zeng, Yunfeng Tao, Yao Pan, Jianping Liu, Kaiyong Yang and Hui Luo
Micromachines 2021, 12(9), 1052; https://doi.org/10.3390/mi12091052 - 30 Aug 2021
Cited by 9 | Viewed by 2987
Abstract
For the axisymmetric shell resonator gyroscopes, the quality factor (Q factor) of the resonator is one of the core parameters limiting their performances. Surface loss is one of the dominating losses, which is related to the subsurface damage (SSD) that is influenced by [...] Read more.
For the axisymmetric shell resonator gyroscopes, the quality factor (Q factor) of the resonator is one of the core parameters limiting their performances. Surface loss is one of the dominating losses, which is related to the subsurface damage (SSD) that is influenced by the grinding parameters. This paper experimentally studies the surface roughness and Q factor variation of six resonators ground by three different grinding speeds. The results suggest that the removal of the SSD cannot improve the Q factor continuously, and the variation of surface roughness is not the dominant reason to affect the Q factor. The measurement results indicate that an appropriate increase in the grinding speed can significantly improve the surface quality and Q factor. This study also demonstrates that a 20 million Q factor for fused silica cylindrical resonators is achievable using appropriate manufacturing processes combined with post-processing etching, which offers possibilities for developing high-precision and low-cost cylindrical resonator gyroscopes. Full article
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15 pages, 6014 KB  
Article
A Novel Method for Estimating and Balancing the Second Harmonic Error of Cylindrical Fused Silica Resonators
by Yunfeng Tao, Yao Pan, Jianping Liu, Yonglei Jia, Kaiyong Yang and Hui Luo
Micromachines 2021, 12(4), 380; https://doi.org/10.3390/mi12040380 - 1 Apr 2021
Cited by 13 | Viewed by 3041
Abstract
The cylindrical resonator gyroscope (CRG) is a type of Coriolis vibratory gyroscope which measures the angular velocity or angle through the precession of the elastic wave of the cylindrical resonator. The cylindrical fused silica resonator is an essential component of the CRG, the [...] Read more.
The cylindrical resonator gyroscope (CRG) is a type of Coriolis vibratory gyroscope which measures the angular velocity or angle through the precession of the elastic wave of the cylindrical resonator. The cylindrical fused silica resonator is an essential component of the CRG, the symmetry of which determines the bias drift and vibration stability of the gyroscope. The manufacturing errors breaking the symmetry of the resonator are usually described by Fourier series, and most studies are only focusing on analyzing and reducing the fourth harmonic error, the main error source of bias drift. The second harmonic error also is one of the obstacles for CRG towards high precision. Therefore, this paper provides a chemical method to evaluate and balance the second harmonic error of cylindrical fused silica resonators. The relation between the frequency split of the n = 1 mode and the second harmonic error of the resonator is obtained. Simulations are performed to analyze the effects of the first three harmonic errors on the frequency splits. The relation between the location of the low-frequency axis of n = 1 mode and the heavy axis of the second harmonic error is also analyzed by simulation. Chemical balancing experiments on two fused silica resonators demonstrate the feasibility of this balancing procedure, and show good consistency with theoretical and simulation analysis. The second harmonic error of the two resonators is reduced by 86.6% and 79.8%, respectively. Full article
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13 pages, 3772 KB  
Letter
A 5.86 Million Quality Factor Cylindrical Resonator with Improved Structural Design Based on Thermoelastic Dissipation Analysis
by Libin Zeng, Yiming Luo, Yao Pan, Yonglei Jia, Jianping Liu, Zhongqi Tan, Kaiyong Yang and Hui Luo
Sensors 2020, 20(21), 6003; https://doi.org/10.3390/s20216003 - 22 Oct 2020
Cited by 28 | Viewed by 4052
Abstract
The cylindrical resonator is the core component of cylindrical resonator gyroscopes (CRGs). The quality factor (Q factor) of the resonator is one crucial parameter that determines the performance of the gyroscope. In this paper, the finite element method is used to theoretically investigate [...] Read more.
The cylindrical resonator is the core component of cylindrical resonator gyroscopes (CRGs). The quality factor (Q factor) of the resonator is one crucial parameter that determines the performance of the gyroscope. In this paper, the finite element method is used to theoretically investigate the influence of the thermoelastic dissipation (TED) of the cylindrical resonator. The improved structure of a fused silica cylindrical resonator is then demonstrated. Compared with the traditional structure, the thermoelastic Q (QTED) of the resonator is increased by 122%. In addition, the Q factor of the improved cylindrical resonator is measured, and results illustrate that, after annealing and chemical etching, the Q factor of the resonator is significantly higher than that of the cylindrical resonators reported previously. The Q factor of the cylindrical resonator in this paper reaches 5.86 million, which is the highest value for a cylindrical resonator to date. Full article
(This article belongs to the Special Issue Theory and Design of Vibration Sensing and Gyroscopic Systems)
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18 pages, 8316 KB  
Article
Cylindrical Shell Vibration Gyroscope Excited and Detected by High-Temperature-Sintered Piezoelectric Ceramic Electrodes
by Tianliang Qu, Guanqing Zhou, Xiaoming Xue and Junhua Teng
Sensors 2020, 20(21), 5972; https://doi.org/10.3390/s20215972 - 22 Oct 2020
Cited by 1 | Viewed by 3705
Abstract
A cylindrical shell piezoelectric vibration gyroscope is a kind of Coriolis vibration gyroscope. Its core components are the cylindrical quartz resonator (CQR) and the piezoelectric ceramic electrodes (PCEs). In order to develop a high-precision Cylindrical shell piezoelectric vibration gyroscope, it is very important [...] Read more.
A cylindrical shell piezoelectric vibration gyroscope is a kind of Coriolis vibration gyroscope. Its core components are the cylindrical quartz resonator (CQR) and the piezoelectric ceramic electrodes (PCEs). In order to develop a high-precision Cylindrical shell piezoelectric vibration gyroscope, it is very important to reduce the influence of the PCEs and obtain a high-quality-factor CQR. To achieve this goal, a novel high-temperature sintering method is proposed to combine the CQR and the PCEs, and the corresponding sintered resonators are fabricated. After sintering, results of the acoustic excitation experiment and piezoelectric excitation experiment are tested, and the influence of the sintered PCEs on the CQR is determined. A complete gyroscope is obtained by vacuum packaging the sintered resonator. Through the open-loop and closed-loop tests, the performance parameters of gyroscope are obtained. The feasibility of the high-temperature sintering method is proved by experiments. Full article
(This article belongs to the Collection Inertial Sensors and Applications)
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13 pages, 3285 KB  
Article
Influence of Temperature Variation on the Vibrational Characteristics of Fused Silica Cylindrical Resonators for Coriolis Vibratory Gyroscopes
by Pengbo Xiao, Zhinan Qiu, Yiming Luo, Yao Pan, Tianliang Qu, Kaiyong Yang, Hui Luo and Shiqiao Qin
Sensors 2020, 20(4), 1032; https://doi.org/10.3390/s20041032 - 14 Feb 2020
Cited by 12 | Viewed by 4264
Abstract
The fused silica cylindrical resonator is a type of axisymmetric resonator that can be used for Coriolis vibratory gyroscopes. Although the resonant frequency, frequency mismatch, and Q factor are natural properties of the resonator, they can change with temperature. Therefore, the temperature drift [...] Read more.
The fused silica cylindrical resonator is a type of axisymmetric resonator that can be used for Coriolis vibratory gyroscopes. Although the resonant frequency, frequency mismatch, and Q factor are natural properties of the resonator, they can change with temperature. Therefore, the temperature drift severely limits the detection accuracy and bias stability of the gyroscope. In this paper, the influence of temperature variation on the vibrational characteristics of fused silica cylindrical resonators was investigated. Experiments were performed on a fused silica cylindrical resonator coated with Cr/Au films. It was shown that at the temperature range from 253.15 K to 353.15 K, the resonant frequency linearly increased with temperature, the frequency mismatch remained unchanged, and the Q factor gradually increased till about 333.15 K, when it began to decrease. Meanwhile, the change of thermoelastic damping with temperature may dominate the variation of Q factor at the temperature range from 253.15 K to 353.15 K. This phenomenon was theoretically analyzed and the variation trends of results were consistent with the theoretical analysis. This study indicates that, for the fused silica cylindrical resonator, to discover the influence of temperature variation on the resonant frequency, frequency mismatch, and Q factor, there are certain rules to follow and repeat. The relationship between temperature and frequency can be established, which provides the feasibility of using self-calibration based on temperature characteristics of the resonator for temperature drift compensations. Additionally, there is an optimum temperature that may improve the performance of the Coriolis vibratory gyroscope with the fused silica cylindrical resonator. Full article
(This article belongs to the Section Physical Sensors)
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17 pages, 4730 KB  
Article
Influence of Electrostatic Forces on the Vibrational Characteristics of Resonators for Coriolis Vibratory Gyroscopes
by Pengbo Xiao, Zhinan Qiu, Yao Pan, Shaoliang Li, Tianliang Qu, Zhongqi Tan, Jianping Liu, Kaiyong Yang, Wanliang Zhao, Hui Luo and Shiqiao Qin
Sensors 2020, 20(1), 295; https://doi.org/10.3390/s20010295 - 5 Jan 2020
Cited by 6 | Viewed by 4334
Abstract
The Coriolis Vibratory Gyroscopes are a type of sensors that measure angular velocities through the Coriolis effect. The resonator is the critical component of the CVGs, the vibrational characteristics of which, including the resonant frequency, frequency mismatch, Q factor, and Q factor asymmetry, [...] Read more.
The Coriolis Vibratory Gyroscopes are a type of sensors that measure angular velocities through the Coriolis effect. The resonator is the critical component of the CVGs, the vibrational characteristics of which, including the resonant frequency, frequency mismatch, Q factor, and Q factor asymmetry, have a great influence on the performance of CVG. The frequency mismatch and Q factor of the resonator, in particular, directly determine the precision and drift characteristics of the gyroscope. Although the frequency mismatch and Q factor are natural properties of the resonator, they can change with external conditions, such as temperature, pressure, and external forces. In this paper, the influence of electrostatic forces on the vibrational characteristics of the fused silica cylindrical resonator is investigated. Experiments were performed on a fused silica cylindrical resonator coated with Cr/Au films. It was shown that the resonant frequency, frequency mismatch, and the decay time slightly decreased with electrostatic forces, while the decay time split increased. Lower capacitive gaps and larger applied voltages resulted in lower frequency mismatch and lower decay time. This phenomenon was theoretically analyzed, and the variation trends of results were consistent with the theoretical analysis. This study indicates that, for fused silica cylindrical resonator with electrostatic transduction, the electrostatic influence on the Q factor and frequency, although small, should be considered when designing the capacitive gap and choosing bias voltages. Full article
(This article belongs to the Section Physical Sensors)
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14 pages, 4633 KB  
Article
Trimming of Imperfect Cylindrical Fused Silica Resonators by Chemical Etching
by Yunfeng Tao, Yao Pan, Shilong Jin, Yonglei Jia, Kaiyong Yang and Hui Luo
Sensors 2019, 19(16), 3596; https://doi.org/10.3390/s19163596 - 18 Aug 2019
Cited by 12 | Viewed by 3375
Abstract
The cylindrical resonator gyroscope (CRG) is a kind of solid-state gyroscope with a wide application market. The cylindrical resonator is the key component of CRG, whose quality factor and symmetry will directly affect the performance of the gyroscope. Due to the material properties [...] Read more.
The cylindrical resonator gyroscope (CRG) is a kind of solid-state gyroscope with a wide application market. The cylindrical resonator is the key component of CRG, whose quality factor and symmetry will directly affect the performance of the gyroscope. Due to the material properties and fabrication limitations, the actual resonator always has some defects. Therefore, frequency trimming, i.e., altering the local mass or stiffness distribution by certain methods, is needed to improve the overall symmetry of the resonator. In this paper, we made further derivation based on the chemical trimming theory proposed by Basarab et al. We built up the relation between the frequency split and the balanced mass to determine the mass to be removed. Chemical trimming experiments were conducted on three cylindrical fused silica resonators. The frequency splits of the three resonators were around 0.05 Hz after chemical trimming. The relation between frequency split and balanced mass established from experimental data was consistent with the theoretical calculation. Therefore, frequency split can be reduced to lower than 0.05 Hz under rigorous theoretical calculation and optimized chemical trimming parameters. Full article
(This article belongs to the Section Physical Sensors)
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13 pages, 2706 KB  
Article
Optical and Electrical Method Characterizing the Dynamic Behavior of the Fused Silica Cylindrical Resonator
by Zhinan Qiu, Tianliang Qu, Yao Pan, Yonglei Jia, Zhenfang Fan, Kaiyong Yang, Jie Yuan and Hui Luo
Sensors 2019, 19(13), 2928; https://doi.org/10.3390/s19132928 - 2 Jul 2019
Cited by 11 | Viewed by 4158
Abstract
Fused silica cylindrical resonant gyroscope (CRG) is a novel high-precision solid-wave gyroscope, whose performance is primarily determined by the cylindrical resonator’s frequency split and quality factor (Q factor). The laser Doppler vibrometer (LDV) is extensively used to measure the dynamic behavior of fused [...] Read more.
Fused silica cylindrical resonant gyroscope (CRG) is a novel high-precision solid-wave gyroscope, whose performance is primarily determined by the cylindrical resonator’s frequency split and quality factor (Q factor). The laser Doppler vibrometer (LDV) is extensively used to measure the dynamic behavior of fused silica cylindrical resonators. An electrical method was proposed to characterize the dynamic behavior of the cylindrical resonator to enhance the measurement efficiency and decrease the equipment cost. With the data acquisition system and the designed signal analysis program based on LabVIEW software, the dynamic behavior of the fused silica cylindrical resonator can be analyzed automatically and quickly. We compared all the electrical measurement results with the optical detection by LDV, demonstrating that the fast Fourier transform (FFT) result of the resonant frequency measured by the electrical method was 0.12 Hz higher than that with the optical method. Thus, the frequency split measured by the electrical and optical methods was the same in 0.18 Hz, and the measurement of the Q factor was basically the same in 730,000. We conducted all measurements under the same operation condition, and the optical method was used as a reference, demonstrating that the electrical method could characterize the dynamic behavior of the fused silica cylindrical resonator and enhance the measurement efficiency. Full article
(This article belongs to the Special Issue Gyroscopes and Accelerometers)
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13 pages, 3804 KB  
Article
Investigation on Eigenfrequency of a Cylindrical Shell Resonator under Resonator-Top Trimming Methods
by Kai Zeng, Youwang Hu, Guiling Deng, Xiaoyan Sun, Wenyi Su, Yunpeng Lu and Ji’an Duan
Sensors 2017, 17(9), 2011; https://doi.org/10.3390/s17092011 - 2 Sep 2017
Cited by 23 | Viewed by 5805
Abstract
The eigenfrequency of a resonator plays a significant role in the operation of a cylindrical shell vibrating gyroscope, and trimming is aimed at eliminating the frequency split that is the difference of eigenfrequency between two work modes. In this paper, the effects on [...] Read more.
The eigenfrequency of a resonator plays a significant role in the operation of a cylindrical shell vibrating gyroscope, and trimming is aimed at eliminating the frequency split that is the difference of eigenfrequency between two work modes. In this paper, the effects on eigenfrequency under resonator-top trimming methods that trim the top of the resonator wall are investigated by simulation and experiments. Simulation results show that the eigenfrequency of the trimmed mode increases in the holes-trimming method, whereas it decreases in the grooves-trimming method. At the same time, the untrimmed modes decrease in both holes-trimming and grooves-trimming methods. Moreover, grooves-trimming is more efficient than holes-trimming, which indicates that grooves-trimming can be a primary trimming method, and holes-trimming can be a precision trimming method. The rigidity condition after grooves-trimming is also studied to explain the variation of eigenfrequency. A femtosecond laser is employed in the resonator trimming experiment by the precise ablation of the material. Experimental results are in agreement with the simulation results. Full article
(This article belongs to the Special Issue Inertial Sensors for Positioning and Navigation)
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13 pages, 8481 KB  
Article
Analysis of the Damping Characteristics of Cylindrical Resonators Influenced by Piezoelectric Electrodes
by Jiangkun Sun, Yulie Wu, Xiang Xi, Yongmeng Zhang and Xuezhong Wu
Sensors 2017, 17(5), 1017; https://doi.org/10.3390/s17051017 - 4 May 2017
Cited by 11 | Viewed by 5334
Abstract
The cylindrical resonator gyroscope (CRG) is a typical Coriolis vibratory gyroscope whose performance is mostly influenced by the damping characteristic of the cylindrical resonator. However, the tremendous damping influences caused by pasting piezoelectric electrodes on the gyroscope, which degrades the performance to a [...] Read more.
The cylindrical resonator gyroscope (CRG) is a typical Coriolis vibratory gyroscope whose performance is mostly influenced by the damping characteristic of the cylindrical resonator. However, the tremendous damping influences caused by pasting piezoelectric electrodes on the gyroscope, which degrades the performance to a large extent, have rarely been studied. In this paper, the dynamical model is established to analyze various forms of energy consumption. In addition, a FE COMSOL model is also created to discuss the damping influences of several significant parameters of the adhesive layer and piezoelectric electrodes, respectively, and then explicit influence laws are obtained. Simulation results demonstrate that the adhesive layer has some impact on the damping characteristic, but it not significant. The Q factor decreases about 30.31% in total as a result of pasting piezoelectric electrodes. What is more, it is discovered that piezoelectric electrodes with short length, locations away from the outside edges, proper width and well-chosen thickness are able to reduce the damping influences to a large extent. Afterwards, experiments of testing the Q factor are set up to validate the simulation values. Full article
(This article belongs to the Section Physical Sensors)
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11 pages, 6232 KB  
Article
Analysis on Node Position of Imperfect Resonators for Cylindrical Shell Gyroscopes
by Zidan Wang, Yulie Wu, Xiang Xi, Yongmeng Zhang and Xuezhong Wu
Sensors 2016, 16(8), 1206; https://doi.org/10.3390/s16081206 - 30 Jul 2016
Cited by 9 | Viewed by 5452
Abstract
For cylindrical shell gyroscopes, node position of their operating eigenmodes has an important influence on the gyroscopes’ performance. It is considered that the nodes are equally separated from each other by 90° when the resonator vibrates in the standing wave eigenmode. However, we [...] Read more.
For cylindrical shell gyroscopes, node position of their operating eigenmodes has an important influence on the gyroscopes’ performance. It is considered that the nodes are equally separated from each other by 90° when the resonator vibrates in the standing wave eigenmode. However, we found that, due to manufacturing errors and trimming, the nodes may not be equally distributed. This paper mainly analyzes the influences of unbalanced masses on the cylindrical resonators’ node position, by using FEM simulation and experimental measurement. Full article
(This article belongs to the Section Physical Sensors)
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14 pages, 4471 KB  
Article
Monolithic Cylindrical Fused Silica Resonators with High Q Factors
by Yao Pan, Dongya Wang, Yanyan Wang, Jianping Liu, Suyong Wu, Tianliang Qu, Kaiyong Yang and Hui Luo
Sensors 2016, 16(8), 1185; https://doi.org/10.3390/s16081185 - 28 Jul 2016
Cited by 45 | Viewed by 9018
Abstract
The cylindrical resonator gyroscope (CRG) is a typical Coriolis vibratory gyroscope whose performance is determined by the Q factor and frequency mismatch of the cylindrical resonator. Enhancing the Q factor is crucial for improving the rate sensitivity and noise performance of the CRG. [...] Read more.
The cylindrical resonator gyroscope (CRG) is a typical Coriolis vibratory gyroscope whose performance is determined by the Q factor and frequency mismatch of the cylindrical resonator. Enhancing the Q factor is crucial for improving the rate sensitivity and noise performance of the CRG. In this paper, for the first time, a monolithic cylindrical fused silica resonator with a Q factor approaching 8 × 105 (ring-down time over 1 min) is reported. The resonator is made of fused silica with low internal friction and high isotropy, with a diameter of 25 mm and a center frequency of 3974.35 Hz. The structure of the resonator is first briefly introduced, and then the experimental non-contact characterization method is presented. In addition, the post-fabrication experimental procedure of Q factor improvement, including chemical and thermal treatment, is demonstrated. The Q factor improvement by both treatments is compared and the primary loss mechanism is analyzed. To the best of our knowledge, the work presented in this paper represents the highest reported Q factor for a cylindrical resonator. The proposed monolithic cylindrical fused silica resonator may enable high performance inertial sensing with standard manufacturing process and simple post-fabrication treatment. Full article
(This article belongs to the Section Physical Sensors)
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10 pages, 1561 KB  
Article
A Novel Vibration Mode Testing Method for Cylindrical Resonators Based on Microphones
by Yongmeng Zhang, Yulie Wu, Xuezhong Wu, Xiang Xi and Jianqiu Wang
Sensors 2015, 15(1), 1954-1963; https://doi.org/10.3390/s150101954 - 16 Jan 2015
Cited by 14 | Viewed by 7509
Abstract
Non-contact testing is an important method for the study of the vibrating characteristic of cylindrical resonators. For the vibratory cylinder gyroscope excited by piezo-electric electrodes, mode testing of the cylindrical resonator is difficult. In this paper, a novel vibration testing method for cylindrical [...] Read more.
Non-contact testing is an important method for the study of the vibrating characteristic of cylindrical resonators. For the vibratory cylinder gyroscope excited by piezo-electric electrodes, mode testing of the cylindrical resonator is difficult. In this paper, a novel vibration testing method for cylindrical resonators is proposed. This method uses a MEMS microphone, which has the characteristics of small size and accurate directivity, to measure the vibration of the cylindrical resonator. A testing system was established, then the system was used to measure the vibration mode of the resonator. The experimental results show that the orientation resolution of the node of the vibration mode is better than 0.1°. This method also has the advantages of low cost and easy operation. It can be used in vibration testing and provide accurate results, which is important for the study of the vibration mode and thermal stability of vibratory cylindrical gyroscopes. Full article
(This article belongs to the Section Physical Sensors)
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