- Article
Gas Box Exhaust Design Modification for Accidental Hazardous Gas Releases in Semiconductor Industry
- Keun-Young Lim,
- Seungho Jung and
- Sang-Ryung Kim
Hazardous substances such as hydrogen and chlorine are used in semiconductor manufacturing. When these gasses are discharged, they are mixed with outside air and are connected to a treatment facility through a duct inside a gas box. This study invest...