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Keywords = scalable microfabrication

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28 pages, 990 KB  
Article
Modular and Distributed Supervisory Control Framework for Intelligent Micro-Manufacturing Systems with Unreliable Events
by Gaosen Dong, Zhengfeng Ming and Hesuan Hu
Micromachines 2025, 16(10), 1076; https://doi.org/10.3390/mi16101076 - 23 Sep 2025
Viewed by 348
Abstract
This paper presents a modular and distributed supervisory control integration framework for intelligent micro-manufacturing systems (MMSs) under event-level failures. Addressing the increasing demand for scalable and reliable supervisory control in both micro- and smart manufacturing, the proposed approach equips each subsystem with a [...] Read more.
This paper presents a modular and distributed supervisory control integration framework for intelligent micro-manufacturing systems (MMSs) under event-level failures. Addressing the increasing demand for scalable and reliable supervisory control in both micro- and smart manufacturing, the proposed approach equips each subsystem with a detector automaton that classifies runtime states into Strictly robust, Recoverably robust, or Non-robust categories. Distributed supervisors then make real-time local decisions to ensure fault-tolerant evolution of system behaviors. Unlike conventional centralized or Petri net-based methods, the proposed automaton-based framework supports modular design and structural scalability. Quantitative comparisons show that the robustness-detection cost scales approximately linearly with the summed sizes of local graphs, indicating good structural scalability. Simulation studies validate the feasibility and scalability of the framework, demonstrating its effectiveness in maintaining production cycle reachability and its integration potential for micro-electro-mechanical systems (MEMS)-based production lines, micro-fabrication platforms, and smart factory environments. These results confirm that the proposed method can serve as a robust and deployable control layer for next-generation intelligent and micro-manufacturing integration architectures. Full article
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10 pages, 1906 KB  
Communication
Multi-Walled Carbon Nanotube Growth on Fe/Al-Coated Thermally Stable Glass Substrates with Relevance to Field Emission
by Yung-Jui Huang, Guang-Yi Zeng, Lei Hu, Kuei-Yi Lee, Huan-Chun Wang and Pao-Hung Lin
Materials 2025, 18(17), 4028; https://doi.org/10.3390/ma18174028 - 28 Aug 2025
Cited by 1 | Viewed by 1328
Abstract
The integration of vertically aligned carbon nanotubes (CNTs) onto glass substrates is a critical step toward realizing transparent and microfabrication-compatible electronic devices. The direct synthesis of patterned vertically aligned multi-walled CNTs (MWCNTs) on glass substrates using chemical vapor deposition (CVD) is demonstrated. Photolithographic [...] Read more.
The integration of vertically aligned carbon nanotubes (CNTs) onto glass substrates is a critical step toward realizing transparent and microfabrication-compatible electronic devices. The direct synthesis of patterned vertically aligned multi-walled CNTs (MWCNTs) on glass substrates using chemical vapor deposition (CVD) is demonstrated. Photolithographic patterning was employed prior to CNT growth to define the spatial geometry of the vertically aligned MWCNTs, enabling precise control over the emitter layout. A key factor influencing CNT morphology was found to be the thickness of the Al buffer layer. Among the tested thicknesses, an aluminum (Al) buffer layer with a thickness of 5 nm yielded optimal results. This configuration facilitates the growth of highly aligned MWCNTs with an average length of approximately 7 μm and a number density of about 109 cm−2. The patterned MWCNTs exhibit excellent vertical alignment and well-defined hexagonal geometries consistent with photolithographic designs. Field emission measurements further validate the material quality, with patterned vertically aligned MWCNTs demonstrating uniform emission and good temporal stability. These results establish a practical and scalable approach for growing patterned vertically aligned MWCNTs directly on thermally stable glass substrates, offering a promising platform for transparent field emission technologies and CNT-based microsystems. Full article
(This article belongs to the Section Carbon Materials)
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15 pages, 2341 KB  
Article
Roll-to-Roll (R2R) High-Throughput Manufacturing of Foil-Based Microfluidic Chips for Neurite Outgrowth Studies
by Nihan Atak, Martin Smolka, Anja Haase, Alexandra Lorenz, Silvia Schobesberger, Stephan Ruttloff, Christian Wolf, Ana Ayerdi-Izquierdo, Peter Ertl, Nerea Briz Iceta, Jan Hesse and Martin Frauenlob
Micromachines 2025, 16(6), 713; https://doi.org/10.3390/mi16060713 - 16 Jun 2025
Cited by 1 | Viewed by 3356
Abstract
Microfluidic devices have emerged as a pivotal in vitro technology for axon outgrowth studies, facilitating the separation of the cell body from the neurites by geometric constraints. However, traditional microfabrication techniques fall short in terms of scalability for large-scale production, hindering widespread application. [...] Read more.
Microfluidic devices have emerged as a pivotal in vitro technology for axon outgrowth studies, facilitating the separation of the cell body from the neurites by geometric constraints. However, traditional microfabrication techniques fall short in terms of scalability for large-scale production, hindering widespread application. This study presents the development of foil-based cell culture chips, made of polyethylene terephthalate and in-house formulated ultraviolet curable liquid resin by high-throughput roll-to-roll (R2R) manufacturing. Here, two microchannel designs were tested to optimize manufacturing quality and assess the neurite outgrowth behavior. The fabricated neuron-foil chips demonstrated biocompatibility and supported neurite outgrowth within microchannels under static cell culture conditions. Furthermore, fluidic flow, oriented either perpendicular or parallel to the microchannel direction, was applied to enhance the biological reproducibility within the neuron-foil chips. These findings suggest that R2R manufacturing offers a promising approach for the high-throughput production of biocompatible microfluidic devices, advancing their potential application in modeling neurological diseases within the biomedical industry. Full article
(This article belongs to the Section B2: Biofabrication and Tissue Engineering)
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13 pages, 4277 KB  
Article
Advancing Nanoscale Copper Deposition Through Ultrafast-Laser-Activated Surface Chemistry
by Modestas Sadauskas, Romualdas Trusovas, Evaldas Kvietkauskas, Viktorija Vrubliauskaitė, Ina Stankevičienė, Aldona Jagminienė, Tomas Murauskas, Dainius Balkauskas, Alexandr Belosludtsev and Karolis Ratautas
Nanomaterials 2025, 15(11), 830; https://doi.org/10.3390/nano15110830 - 30 May 2025
Viewed by 822
Abstract
Direct-writing submicron copper circuits on glass with laser precision—without lithography, vacuum deposition, or etching—represents a transformative step in next-generation microfabrication. We present a high-resolution, maskless method for metallizing glass using ultrashort pulse Bessel beam laser processing, followed by silver ion activation and electroless [...] Read more.
Direct-writing submicron copper circuits on glass with laser precision—without lithography, vacuum deposition, or etching—represents a transformative step in next-generation microfabrication. We present a high-resolution, maskless method for metallizing glass using ultrashort pulse Bessel beam laser processing, followed by silver ion activation and electroless copper plating. The laser-modified glass surface hosts nanoscale chemical defects that promote the in situ reduction of Ag+ to metallic Ag0 upon exposure to AgNO3 solution. These silver seeds act as robust catalytic and adhesion sites for subsequent copper growth. Using this approach, we demonstrate circuit traces as narrow as 0.7 µm, featuring excellent uniformity and adhesion. Compared to conventional redistribution-layer (RDL) and under-bump-metallization (UBM) techniques, this process eliminates multiple lithographic and vacuum-based steps, significantly reducing process complexity and production time. The method is scalable and adaptable for applications in transparent electronics, fan-out packaging, and high-density interconnects. Full article
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40 pages, 3743 KB  
Review
Droplet Generation and Manipulation in Microfluidics: A Comprehensive Overview of Passive and Active Strategies
by Andrea Fergola, Alberto Ballesio, Francesca Frascella, Lucia Napione, Matteo Cocuzza and Simone Luigi Marasso
Biosensors 2025, 15(6), 345; https://doi.org/10.3390/bios15060345 - 29 May 2025
Cited by 3 | Viewed by 4858
Abstract
Droplet-based microfluidics (DBM) has emerged as a powerful tool for a wide range of biochemical applications, from single-cell analysis and drug screening to diagnostics and tissue engineering. This review provides a comprehensive overview of the latest advancements in droplet generation and trapping techniques, [...] Read more.
Droplet-based microfluidics (DBM) has emerged as a powerful tool for a wide range of biochemical applications, from single-cell analysis and drug screening to diagnostics and tissue engineering. This review provides a comprehensive overview of the latest advancements in droplet generation and trapping techniques, highlighting both passive and active approaches. Passive methods—such as co-flow, cross-flow, and flow-focusing geometries—rely on hydrodynamic instabilities and capillary effects, offering simplicity and integration with compact devices, though often at the cost of tunability. In contrast, active methods exploit external fields—electric, magnetic, thermal, or mechanical—to enable on-demand droplet control, allowing for higher precision and throughput. Furthermore, we explore innovative trapping mechanisms such as hydrodynamic resistance networks, microfabricated U-shaped wells, and anchor-based systems that enable precise spatial immobilization of droplets. In the final section, we also examine active droplet sorting strategies, including electric, magnetic, acoustic, and thermal methods, as essential tools for downstream analysis and high-throughput workflows. These manipulation strategies facilitate in situ chemical and biological analyses, enhance experimental reproducibility, and are increasingly adaptable to industrial-scale applications. Emphasis is placed on the design flexibility, scalability, and biological compatibility of each method, offering critical insights for selecting appropriate techniques based on experimental needs and operational constraints. Full article
(This article belongs to the Special Issue Micro/Nanofluidic System-Based Biosensors)
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47 pages, 4047 KB  
Review
Polydopamine Applications in Biomedicine and Environmental Science
by Hossein Omidian and Renae L. Wilson
Materials 2024, 17(16), 3916; https://doi.org/10.3390/ma17163916 - 7 Aug 2024
Cited by 10 | Viewed by 4263
Abstract
This manuscript explores the multifaceted applications of polydopamine (PDA) across various scientific and industrial domains. It covers the chemical aspects of PDA and its potential in bone tissue engineering, implant enhancements, cancer treatment, and nanotechnology. The manuscript investigates PDA’s roles in tissue engineering, [...] Read more.
This manuscript explores the multifaceted applications of polydopamine (PDA) across various scientific and industrial domains. It covers the chemical aspects of PDA and its potential in bone tissue engineering, implant enhancements, cancer treatment, and nanotechnology. The manuscript investigates PDA’s roles in tissue engineering, cell culture technologies, surface modifications, drug delivery systems, and sensing techniques. Additionally, it highlights PDA’s contributions to microfabrication, nanoengineering, and environmental applications. Through detailed testing and assessment, the study identifies limitations in PDA-related research, such as synthesis complexity, incomplete mechanistic understanding, and biocompatibility variability. It also proposes future research directions aimed at improving synthesis techniques, expanding biomedical applications, and enhancing sensing technologies to optimize PDA’s efficacy and scalability. Full article
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29 pages, 10083 KB  
Review
Microfluidic Devices for Heavy Metal Ions Detection: A Review
by Myrto-Kyriaki Filippidou and Stavros Chatzandroulis
Micromachines 2023, 14(8), 1520; https://doi.org/10.3390/mi14081520 - 28 Jul 2023
Cited by 33 | Viewed by 7069
Abstract
The contamination of air, water and soil by heavy metal ions is one of the most serious problems plaguing the environment. These metal ions are characterized by a low biodegradability and high chemical stability and can affect humans and animals, causing severe diseases. [...] Read more.
The contamination of air, water and soil by heavy metal ions is one of the most serious problems plaguing the environment. These metal ions are characterized by a low biodegradability and high chemical stability and can affect humans and animals, causing severe diseases. In addition to the typical analysis methods, i.e., liquid chromatography (LC) or spectrometric methods (i.e., atomic absorption spectroscopy, AAS), there is a need for the development of inexpensive, easy-to-use, sensitive and portable devices for the detection of heavy metal ions at the point of interest. To this direction, microfluidic and lab-on-chip (LOC) devices fabricated with novel materials and scalable microfabrication methods have been proposed as a promising approach to realize such systems. This review focuses on the recent advances of such devices used for the detection of the most important toxic metal ions, namely, lead (Pb), mercury (Hg), arsenic (As), cadmium (Cd) and chromium (Cr) ions. Particular emphasis is given to the materials, the fabrication methods and the detection methods proposed for the realization of such devices in order to provide a complete overview of the existing technology advances as well as the limitations and the challenges that should be addressed in order to improve the commercial uptake of microfluidic and LOC devices in environmental monitoring applications. Full article
(This article belongs to the Special Issue Microfluidics for Food Science Applications)
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12 pages, 2151 KB  
Article
Synthesis of Wrinkle-Free Metallic Thin Films in Polymer by Interfacial Instability Suppression with Nanoparticles
by Maryam Jalali-Mousavi, Samuel Kok Suen Cheng and Jian Sheng
Nanomaterials 2023, 13(6), 1044; https://doi.org/10.3390/nano13061044 - 14 Mar 2023
Viewed by 2702
Abstract
Synthesis of a smooth conductive film over an elastomer is vital to the development of flexible optics and wearable electronics, but applications are hindered by wrinkles and cracks in the film. To date, a large-scale wrinkle-free film in an elastomer has yet to [...] Read more.
Synthesis of a smooth conductive film over an elastomer is vital to the development of flexible optics and wearable electronics, but applications are hindered by wrinkles and cracks in the film. To date, a large-scale wrinkle-free film in an elastomer has yet to be achieved. We present a robust method to fabricate wrinkle-free, stress-free, and optically smooth thin film in elastomer. Targeting underlying mechanisms, we applied nanoparticles between the film and elastomer to jam the interface and subsequently suppress interfacial instabilities to prevent the formation of wrinkles. Using polydimethylsiloxane (PDMS) and parylene-C as a model system, we have synthesized large-scale (>10 cm) wrinkle-free Al film over/in PDMS and demonstrated the principle of interface jamming by nanoparticles. We varied the jammer layer thickness to show that, as the layer exceeds a critical thickness (e.g., 150 nm), wrinkles are successfully suppressed. Nano-indentation experiments revealed that the interface becomes more elastic and less viscoelastic with respect to the jammer thickness, which further supports our assertion of the wrinkle suppression mechanism. Since the film was embedded in a polymer matrix, the resultant film was highly deformable, elastic, and optically smooth with applications for deformable optical sensors and actuators. Full article
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17 pages, 2985 KB  
Article
Bioadhesive Tannic-Acid-Functionalized Zein Coating Achieves Engineered Colonic Delivery of IBD Therapeutics via Reservoir Microdevices
by Khorshid Kamguyan, Rolf Bech Kjeldsen, Saeed Zajforoushan Moghaddam, Melanie Randahl Nielsen, Esben Thormann, Kinga Zór, Line Hagner Nielsen and Anja Boisen
Pharmaceutics 2022, 14(11), 2536; https://doi.org/10.3390/pharmaceutics14112536 - 21 Nov 2022
Cited by 13 | Viewed by 3490
Abstract
The biggest challenge in oral delivery of anti-inflammatory drugs such as 5-aminosalicylic acid (5-ASA) is to (i) prevent rapid absorption in the small intestine and (ii) achieve localized release at the site of inflammation in the lower gut, i.e., the colon. Here, we [...] Read more.
The biggest challenge in oral delivery of anti-inflammatory drugs such as 5-aminosalicylic acid (5-ASA) is to (i) prevent rapid absorption in the small intestine and (ii) achieve localized release at the site of inflammation in the lower gut, i.e., the colon. Here, we present an advanced biopolymeric coating comprising of tannic-acid-functionalized zein protein to provide a sustained, colon-targeted release profile for 5-ASA and enhance the mucoadhesion of the dosage form via a mussel-inspired mechanism. To enable localized delivery and provide high local concentration, 5-ASA is loaded into the microfabricated drug carriers (microcontainers) and sealed with the developed coating. The functionality and drug release profile of the coating are characterized and optimized in vitro, showing great tunability, scalability, and stability toward proteases. Further, ex vivo experiments demonstrate that the tannic acid functionalization can significantly enhance the mucoadhesion of the coating, which is followed up by in vivo investigations on the intestinal retention, and pharmacokinetic evaluation of the 5-ASA delivery system. Results indicate that the developed coating can provide prolonged colonic delivery of 5-ASA. Therefore, the here-developed biodegradable coating can be an eco-friendly substitute to the state-of-the-art commercial counterparts for targeted delivery of 5-ASA and other small molecule drugs. Full article
(This article belongs to the Section Drug Delivery and Controlled Release)
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26 pages, 1733 KB  
Review
Engineering Spatiotemporal Control in Vascularized Tissues
by Astha Khanna, Beu P. Oropeza and Ngan F. Huang
Bioengineering 2022, 9(10), 555; https://doi.org/10.3390/bioengineering9100555 - 14 Oct 2022
Cited by 17 | Viewed by 4611
Abstract
A major challenge in engineering scalable three-dimensional tissues is the generation of a functional and developed microvascular network for adequate perfusion of oxygen and growth factors. Current biological approaches to creating vascularized tissues include the use of vascular cells, soluble factors, and instructive [...] Read more.
A major challenge in engineering scalable three-dimensional tissues is the generation of a functional and developed microvascular network for adequate perfusion of oxygen and growth factors. Current biological approaches to creating vascularized tissues include the use of vascular cells, soluble factors, and instructive biomaterials. Angiogenesis and the subsequent generation of a functional vascular bed within engineered tissues has gained attention and is actively being studied through combinations of physical and chemical signals, specifically through the presentation of topographical growth factor signals. The spatiotemporal control of angiogenic signals can generate vascular networks in large and dense engineered tissues. This review highlights the developments and studies in the spatiotemporal control of these biological approaches through the coordinated orchestration of angiogenic factors, differentiation of vascular cells, and microfabrication of complex vascular networks. Fabrication strategies to achieve spatiotemporal control of vascularization involves the incorporation or encapsulation of growth factors, topographical engineering approaches, and 3D bioprinting techniques. In this article, we highlight the vascularization of engineered tissues, with a focus on vascularized cardiac patches that are clinically scalable for myocardial repair. Finally, we discuss the present challenges for successful clinical translation of engineered tissues and biomaterials. Full article
(This article belongs to the Special Issue Cell-ECM Interactions for Tissue Engineering and Tissue Regeneration)
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13 pages, 15307 KB  
Article
Scalable Additive Construction of Arrayed Microstructures with Encoded Properties for Bioimaging
by Matthew DiSalvo, Belén Cortés-Llanos, Cody A. LaBelle, David M. Murdoch and Nancy L. Allbritton
Micromachines 2022, 13(9), 1392; https://doi.org/10.3390/mi13091392 - 25 Aug 2022
Cited by 1 | Viewed by 2194
Abstract
Microarrays are essential components of analytical instruments. The elements of microarrays may be imbued with additional functionalities and encodings using composite materials and structures, but traditional microfabrication methods present substantial barriers to fabrication, design, and scalability. In this work, a tool-free technique was [...] Read more.
Microarrays are essential components of analytical instruments. The elements of microarrays may be imbued with additional functionalities and encodings using composite materials and structures, but traditional microfabrication methods present substantial barriers to fabrication, design, and scalability. In this work, a tool-free technique was reported to additively batch-construct micromolded, composite, and arrayed microstructures. The method required only a compatible carrier fluid to deposit a material onto a substrate with some topography. Permutations of this basic fabrication approach were leveraged to gain control over the volumes and positions of deposited materials within the microstructures. As a proof of concept, cell micro-carrier arrays were constructed to demonstrate a range of designs, compositions, functionalities, and applications for composite microstructures. This approach is envisioned to enable the fabrication of complex composite biological and synthetic microelements for biosensing, cellular analysis, and biochemical screening. Full article
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15 pages, 4573 KB  
Article
A Scalable and Low Stress Post-CMOS Processing Technique for Implantable Microsensors
by Ah-Hyoung Lee, Jihun Lee, Farah Laiwalla, Vincent Leung, Jiannan Huang, Arto Nurmikko and Yoon-Kyu Song
Micromachines 2020, 11(10), 925; https://doi.org/10.3390/mi11100925 - 5 Oct 2020
Cited by 15 | Viewed by 6225
Abstract
Implantable active electronic microchips are being developed as multinode in-body sensors and actuators. There is a need to develop high throughput microfabrication techniques applicable to complementary metal–oxide–semiconductor (CMOS)-based silicon electronics in order to process bare dies from a foundry to physiologically compatible implant [...] Read more.
Implantable active electronic microchips are being developed as multinode in-body sensors and actuators. There is a need to develop high throughput microfabrication techniques applicable to complementary metal–oxide–semiconductor (CMOS)-based silicon electronics in order to process bare dies from a foundry to physiologically compatible implant ensembles. Post-processing of a miniature CMOS chip by usual methods is challenging as the typically sub-mm size small dies are hard to handle and not readily compatible with the standard microfabrication, e.g., photolithography. Here, we present a soft material-based, low chemical and mechanical stress, scalable microchip post-CMOS processing method that enables photolithography and electron-beam deposition on hundreds of micrometers scale dies. The technique builds on the use of a polydimethylsiloxane (PDMS) carrier substrate, in which the CMOS chips were embedded and precisely aligned, thereby enabling batch post-processing without complication from additional micromachining or chip treatments. We have demonstrated our technique with 650 μm × 650 μm and 280 μm × 280 μm chips, designed for electrophysiological neural recording and microstimulation implants by monolithic integration of patterned gold and PEDOT:PSS electrodes on the chips and assessed their electrical properties. The functionality of the post-processed chips was verified in saline, and ex vivo experiments using wireless power and data link, to demonstrate the recording and stimulation performance of the microscale electrode interfaces. Full article
(This article belongs to the Special Issue Implantable Neural Sensors for the Brain Machine Interface)
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34 pages, 4212 KB  
Review
Advanced Nanomaterials, Printing Processes, and Applications for Flexible Hybrid Electronics
by Sehyun Park, Hojoong Kim, Jong-Hoon Kim and Woon-Hong Yeo
Materials 2020, 13(16), 3587; https://doi.org/10.3390/ma13163587 - 13 Aug 2020
Cited by 42 | Viewed by 9518
Abstract
Recent advances in nanomaterial preparation and printing technologies provide unique opportunities to develop flexible hybrid electronics (FHE) for various healthcare applications. Unlike the costly, multi-step, and error-prone cleanroom-based nano-microfabrication, the printing of nanomaterials offers advantages, including cost-effectiveness, high-throughput, reliability, and scalability. Here, this [...] Read more.
Recent advances in nanomaterial preparation and printing technologies provide unique opportunities to develop flexible hybrid electronics (FHE) for various healthcare applications. Unlike the costly, multi-step, and error-prone cleanroom-based nano-microfabrication, the printing of nanomaterials offers advantages, including cost-effectiveness, high-throughput, reliability, and scalability. Here, this review summarizes the most up-to-date nanomaterials, methods of nanomaterial printing, and system integrations to fabricate advanced FHE in wearable and implantable applications. Detailed strategies to enhance the resolution, uniformity, flexibility, and durability of nanomaterial printing are summarized. We discuss the sensitivity, functionality, and performance of recently reported printed electronics with application areas in wearable sensors, prosthetics, and health monitoring implantable systems. Collectively, the main contribution of this paper is in the summary of the essential requirements of material properties, mechanisms for printed sensors, and electronics. Full article
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22 pages, 388 KB  
Review
Emerging Encapsulation Technologies for Long-Term Reliability of Microfabricated Implantable Devices
by Seung-Hee Ahn, Joonsoo Jeong and Sung June Kim
Micromachines 2019, 10(8), 508; https://doi.org/10.3390/mi10080508 - 31 Jul 2019
Cited by 81 | Viewed by 7948
Abstract
The development of reliable long-term encapsulation technologies for implantable biomedical devices is of paramount importance for the safe and stable operation of implants in the body over a period of several decades. Conventional technologies based on titanium or ceramic packaging, however, are not [...] Read more.
The development of reliable long-term encapsulation technologies for implantable biomedical devices is of paramount importance for the safe and stable operation of implants in the body over a period of several decades. Conventional technologies based on titanium or ceramic packaging, however, are not suitable for encapsulating microfabricated devices due to their limited scalability, incompatibility with microfabrication processes, and difficulties with miniaturization. A variety of emerging materials have been proposed for encapsulation of microfabricated implants, including thin-film inorganic coatings of Al2O3, HfO2, SiO2, SiC, and diamond, as well as organic polymers of polyimide, parylene, liquid crystal polymer, silicone elastomer, SU-8, and cyclic olefin copolymer. While none of these materials have yet been proven to be as hermetic as conventional metal packages nor widely used in regulatory approved devices for chronic implantation, a number of studies have demonstrated promising outcomes on their long-term encapsulation performance through a multitude of fabrication and testing methodologies. The present review article aims to provide a comprehensive, up-to-date overview of the long-term encapsulation performance of these emerging materials with a specific focus on publications that have quantitatively estimated the lifetime of encapsulation technologies in aqueous environments. Full article
(This article belongs to the Special Issue Implantable Neural Sensors for the Brain Machine Interface)
21 pages, 3796 KB  
Article
Scalable, Modular Three-Dimensional Silicon Microelectrode Assembly via Electroless Plating
by Jörg Scholvin, Anthony Zorzos, Justin Kinney, Jacob Bernstein, Caroline Moore-Kochlacs, Nancy Kopell, Clifton Fonstad and Edward S. Boyden
Micromachines 2018, 9(9), 436; https://doi.org/10.3390/mi9090436 - 30 Aug 2018
Cited by 5 | Viewed by 6483
Abstract
We devised a scalable, modular strategy for microfabricated 3-D neural probe synthesis. We constructed a 3-D probe out of individual 2-D components (arrays of shanks bearing close-packed electrodes) using mechanical self-locking and self-aligning techniques, followed by electroless nickel plating to establish electrical contact [...] Read more.
We devised a scalable, modular strategy for microfabricated 3-D neural probe synthesis. We constructed a 3-D probe out of individual 2-D components (arrays of shanks bearing close-packed electrodes) using mechanical self-locking and self-aligning techniques, followed by electroless nickel plating to establish electrical contact between the individual parts. We detail the fabrication and assembly process and demonstrate different 3-D probe designs bearing thousands of electrode sites. We find typical self-alignment accuracy between shanks of <0.2° and demonstrate orthogonal electrical connections of 40 µm pitch, with thousands of connections formed electrochemically in parallel. The fabrication methods introduced allow the design of scalable, modular electrodes for high-density 3-D neural recording. The combination of scalable 3-D design and close-packed recording sites may support a variety of large-scale neural recording strategies for the mammalian brain. Full article
(This article belongs to the Special Issue Neural Microelectrodes: Design and Applications)
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