Search Results (14)

Helium is integral in several industries, including nuclear waste management and semiconductors. Thus, developing a sensing method for detecting helium is essential to ensure the proper operation of such facilities. Several approaches can be used for helium detection, including based on the high thermal conductivity of helium, which is several times higher than air. This work utilizes the high thermal conductivity of helium to design and analyze a bimorph MEMS sensor for helium sensing applications. COMSOL Multiphysics software (version 6.2) is used to carry out this investigation. The sensor is constructed from poly-silicon and SiO₂ materials with a trenched cantilever beam configuration. The sensor is electrically heated, and its morphed displacement depends on the surrounding gas’s composition, which decreases in the presence of helium. Several factors were investigated to probe their effect on the sensor’s sensitivity to helium, including the thickness of the poly-silicon layer, the configuration of the trench, and the thickness and location of SiO₂ layer. The simulations showed that the best performance, up to 2 ppm helium detection level, can be achieved with thinner beams and medium trench lengths. Full article

The generation of microactuation using narrow thermal hysteresis Ti-Ni-Cu shape-memory alloy films deposited on non-metallic substrates as the active element is studied based on a model previously developed for Ni-Ti/Si bimorphs. To this end, the compositional range in which the B2 (monoclinic) → B19 (orthorhombic) martensitic phase transformation occurs was considered, and films were deposited by magnetron sputtering on heated Si and Kapton substrates. Ultra-fine grains were observed for the 550 °C deposition temperature. The selected composition was close to Ti₅₀Ni₃₅Cu₁₅, so the narrowing of the thermal hysteresis is not associated with a significant reduction in shape recovery capability. The microstructure and composition of the target materials and as-deposited films used in our experiments were characterized by X-ray diffraction and scanning electron microscopy, whereas the temperature dependence of the volume fraction of the martensite phase was derived using differential scanning calorimetry records for the target materials and from the temperature dependence of the electrical resistance data for the films. An original model was used to predict the actuation of cantilever-type bimorphs with Kapton and Si substrates. Full article

Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced. Full article

TiNi-TiCu quasibinary system alloys with a high Cu content produced by rapid quenching from liquid state in the form of thin amorphous ribbons exhibit pronounced shape memory effect after crystallization and are promising materials for miniaturized and fast operating devices. There is currently no complete clarity of the mechanisms of structure formation during crystallization from the amorphous state that determine the structure-sensitive properties of these alloys. This work deals with the effect of the initial amorphous state structure and crystallization method of the alloys on their structure and phase transformations. To this end the alloy containing 30 at.% Cu was subjected to thermal and mechanical impact in the amorphous state and crystallized using isothermal or electropulse treatment. We show that after all types of treatment in the amorphous state the structure of the alloy remains almost completely amorphous but the characteristic temperatures and enthalpy of crystallization become slightly lower. Isothermal crystallization of alloy specimens produces a submicrocrystalline structure with an average grain size in the 0.4–1.0 μm range whereas electropulse crystallization generates a bimorphic structure consisting of large 4–6 μm grains and 2–3 μm high columnar crystals in the vicinity of the surface. The grains have nanosized plate-like and subgrain structures. The largest grains are observed in thermally activated samples, meanwhile, mechanical impact in the amorphous state leads to the formation of equiaxed finer grains with a less defective subgrain structure and to the shift of the temperature range of the martensitic transformation toward lower temperatures. Full article

A large-area and ultrathin MEMS (microelectromechanical system) mirror can provide efficient light-coupling, a large scanning area, and high energy efficiency for actuation. However, the ultrathin mirror is significantly vulnerable to diverse film deformation due to residual thin film stresses, so that high flatness of the mirror is hardly achieved. Here, we report a MEMS mirror of large-area and ultrathin membrane with high flatness by using the silicon rim microstructure (SRM). The ultrathin MEMS mirror with SRM (SRM-mirror) consists of aluminum (Al) deposited silicon nitride membrane, bimorph actuator, and the SRM. The SRM is simply fabricated underneath the silicon nitride membrane, and thus effectively inhibits the tensile stress relaxation of the membrane. As a result, the membrane has high flatness of 10.6 m⁻¹ film curvature at minimum without any deformation. The electrothermal actuation of the SRM-mirror shows large tilting angles from 15° to −45° depending on the applied DC voltage of 0~4 V_DC, preserving high flatness of the tilting membrane. This stable and statically actuated SRM-mirror spurs diverse micro-optic applications such as optical sensing, beam alignment, or optical switching. Full article

This paper presents a novel dual-level capacitive microcantilever-based thermal detector that is implemented in the commercial surface micromachined PolyMUMPs technology. The proposed design is implemented side-by-side with four different single-level designs to enable a design-to-design performance comparison. The dual-level design exhibits a rate of capacitance change per degree Celsius that is over three times higher than that of the single-level designs and has a base capacitance that is more than twice as large. These improvements are achieved because the dual-level architecture allows a 100% electrode-to-detector area, while single-level designs are shown to suffer from an inherent trade-off between sensitivity and base capacitance. In single-level designs, either the number of the bimorph beams or the capacitance electrode can be increased for a given sensor area. The former is needed for a longer effective length of the bimorph for higher thermomechanical sensitivity (i.e., larger tilting angels per degree Celsius), while the latter is desired to relax the read-out integrated-circuits requirements. This thermomechanical response-to-initial capacitance trade-off is mitigated by the dual-level design, which dedicates one structural layer to serve as the upper electrode of the detector, while the other layer contains as many bimorph beams as desired, independently of the former’s area. Full article

Piezoelectric unimorph deformable mirrors offer a cheap solution to adaptive optics, with mass production capability. However, standard solutions have significant drawbacks: (i) the static shape is sensitive to the temperature, and (ii) the low structural damping limits the control bandwidth, because of the interaction between the shape control and the vibration modes of the mirror. This paper discusses how these two problems may be alleviated by using a mirror covered with an array of actuators working in d₃₁ mode on the back side and a ring of transducers (actuators and sensors) on the front side, outside the pupil of the mirror. Full article

Here, we provide a method and apparatus for real-time compensation of the thermal effect of single free-standing piezoresistive microcantilever-based biosensors. The sensor chip contained an on-chip fixed piezoresistor that served as a temperature sensor, and a multilayer microcantilever with an embedded piezoresistor served as a biomolecular sensor. This method employed the calibrated relationship between the resistance and the temperature of piezoresistors to eliminate the thermal effect on the sensor, including the temperature coefficient of resistance (TCR) and bimorph effect. From experimental results, the method was verified to reduce the signal of thermal effect from 25.6 μV/°C to 0.3 μV/°C, which was approximately two orders of magnitude less than that before the processing of the thermal elimination method. Furthermore, the proposed approach and system successfully demonstrated its effective real-time thermal self-elimination on biomolecular detection without any thermostat device to control the environmental temperature. This method realizes the miniaturization of an overall measurement system of the sensor, which can be used to develop portable medical devices and microarray analysis platforms. Full article

This paper presents a design optimization method based on theoretical analysis and numerical calculations, using a commercial multi-physics solver (e.g., ANSYS and ESI CFD-ACE+), for a 3D continuous model, to analyze the bending characteristics of an electrically heated bimorph microcantilever. The results from the theoretical calculation and numerical analysis are compared with those measured using a CCD camera and magnification lenses for a chip level microcantilever array fabricated in this study. The bimorph microcantilevers are thermally actuated by joule heating generated by a 0.4 μm thin-film Au heater deposited on 0.6 μm Si₃N₄ microcantilevers. The initial deflections caused by residual stress resulting from the thermal bonding of two metallic layers with different coefficients of thermal expansion (CTEs) are additionally considered, to find the exact deflected position. The numerically calculated total deflections caused by electrical actuation show differences of 10%, on average, with experimental measurements in the operating current region (i.e., ~25 mA) to prevent deterioration by overheating. Bimorph microcantilevers are promising components for use in various MEMS (Micro-Electro-Mechanical System) sensing applications, and their deflection characteristics in static mode sensing are essential for detecting changes in thermal stress on the surface of microcantilevers. Full article

Micro-electro-mechanical system (MEMS) mirrors are widely used for optical modulation, attenuation, steering, switching and tracking. In most cases, MEMS mirrors are packaged in air, resulting in overshoot and ringing upon actuation. In this paper, an electrothermal bimorph MEMS mirror that does not generate overshoot in step response, even operating in air, is reported. This is achieved by properly designing the thermal response time and the mechanical resonance without using any open-loop or closed-loop control. Electrothermal and thermomechanical lumped-element models are established. According to the analysis, when setting the product of the thermal response time and the fundamental resonance frequency to be greater than Q/2π, the mechanical overshoot and oscillation caused by a step signal can be eliminated effectively. This method is verified experimentally with fabricated electrothermal bimorph MEMS mirrors. Full article

In this paper, the actuation behavior of a two-axis electrothermal MEMS (Microelectromechanical Systems) mirror typically used in miniature optical scanning probes and optical switches is investigated. The MEMS mirror consists of four thermal bimorph actuators symmetrically located at the four sides of a central mirror plate. Experiments show that an actuation characteristics difference of as much as 4.0% exists among the four actuators due to process variations, which leads to an average angular scan error of 0.03°. A mathematical model between the actuator input voltage and the mirror-plate position has been developed to predict the actuation behavior of the mirror. It is a four-input, four-output model that takes into account the thermal-mechanical coupling and the differences among the four actuators; the vertical positions of the ends of the four actuators are also monitored. Based on this model, an open-loop control method is established to achieve accurate angular scanning. This model-based open loop control has been experimentally verified and is useful for the accurate control of the mirror. With this control method, the precise actuation of the mirror solely depends on the model prediction and does not need the real-time mirror position monitoring and feedback, greatly simplifying the MEMS control system. Full article

This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical displacement from the angular motion of the bimorphs. The W layer is also used as the embedded heater. The silicon underneath the entire actuator is completely removed using a unique backside deep-reactive-ion-etching DRIE release process, leading to improved thermal response speed and front-side mirror surface protection. This MEMS mirror can perform both piston and tip-tilt motion. The mirror generates large pure vertical displacement up to 320 μm at only 3 V with a power consumption of 56 mW for each actuator. The maximum optical scan angle achieved is ±18° at 3 V. The measured thermal response time is 15.4 ms and the mechanical resonances of piston and tip-tilt modes are 550 Hz and 832 Hz, respectively. Full article

Bi-layer (Au-Si₃N₄) microcantilevers fabricated in an array were used to detect vapors of energetic materials such as explosives under ambient conditions. The changes in the bending response of each thermal bimorph (i.e., microcantilever) with changes in actuation currents were experimentally monitored by measuring the angle of the reflected ray from a laser source used to illuminate the gold nanocoating on the surface of silicon nitride microcantilevers in the absence and presence of a designated combustible species. Experiments were performed to determine the signature response of this nano-calorimeter platform for each explosive material considered for this study. Numerical modeling was performed to predict the bending response of the microcantilevers for various explosive materials, species concentrations, and actuation currents. The experimental validation of the numerical predictions demonstrated that in the presence of different explosive or combustible materials, the microcantilevers exhibited unique trends in their bending responses with increasing values of the actuation current. Full article

In this work, the problem of a curved functionally graded piezoelectric (FGP) actuator with sandwich structure under electrical and thermal loads is investigated. The middle layer in the sandwich structure is functionally graded with the piezoelectric coefficient g₃₁ varying continuously along the radial direction of the curved actuator. Based on the theory of linear piezoelectricity, analytical solutions are obtained by using Airy stress function to examine the effects of material gradient and heat conduction on the performance of the curved actuator. It is found that the material gradient and thermal load have significant influence on the electroelastic fields and the mechanical response of the curved FGP actuator. Without the sacrifice of actuation deflection, smaller internal stresses are generated by using the sandwich actuator with functionally graded piezoelectric layer instead of the conventional bimorph actuator. This work is very helpful for the design and application of curved piezoelectric actuators under thermal environment. Full article